Semiconductor device

ABSTRACT

A semiconductor device includes an antenna functioning as a coil, a capacitor electrically connected to the antenna in parallel, a passive element forming a resonance circuit with the antenna and the capacitor by being electrically connected to the antenna and the capacitor in parallel, a first field effect transistor controlling whether the passive element is electrically connected to the antenna and the capacitor in parallel or not, and a memory circuit. The memory circuit includes a second field effect transistor which includes an oxide semiconductor layer where a channel is formed and in which a data signal is input to one of a source and a drain. The gate voltage of the first field effect transistor is set depending on the voltage of the other of the source and the drain of the second field effect transistor.

BACKGROUND OF THE INVENTION

1. Field of the Invention

One embodiment of the present invention relates to a semiconductordevice.

2. Description of the Related Art

In recent years, semiconductor devices have been developed which arecapable of supplying (also referred to as feeding) power (also referredto as a power supply voltage) through wireless communication, andfurther capable of transmitting and receiving data (also referred to asdata communication) through wireless communication. For example, if afeeding function through wireless communication can be added to aportable information terminal (e.g., a cellular phone) which is anexample of the semiconductor devices, the portable information terminaldoes not need to be connected to an external power feeding portion andcan be fed more easily, for example, in any environment.

An individual identification technology utilizing a radio frequencyidentification (RFID) tag is known as an example of semiconductordevices capable of data transmission, data reception, data storing, dataerasing, and the like through wireless communication. The RFID tag isalso referred to as an RF tag, a wireless tag, an electronic tag, or awireless chip. The RFID tag is also referred to as an IC tag, an ICchip, or an IC card because it includes a functional circuit such as anintegrated circuit (IC) for executing authentication or otherprocessing. Data communication with the semiconductor device isperformed by using a wireless communication device (such as areader/writer, which is capable of transmitting and receiving a datasignal through wireless communication). The individual identificationtechnology using the semiconductor device is used for the production,management, or the like of an individual object and has been expected tobe applied to personal authentication.

In the semiconductor device, the resonant inductance is set by a coil(antenna) or the like and the resonant capacitance is set by a capacitoror the like to set the resonance frequency, whereby a value of a powersupply voltage to be supplied is set. However, an actual resonancefrequency differs from a desired resonance frequency due to variationsin a manufacturing process, in some cases. In that case, the resonancefrequency needs to be readjusted after the process is finished.

As a measure against the above problem, a semiconductor device in whichthe resonance frequency is set at an optimal level by a resonancefrequency adjustment circuit has been known (e.g., Patent Document 1).

In the semiconductor device disclosed in Patent Document 1, whether acapacitor is connected to an antenna in parallel or not is controlled bysetting of a gate voltage of a control transistor. For example, when thecontrol transistor is turned on and the capacitor is connected to theantenna in parallel, the resonance frequency changes.

REFERENCE Patent Document

[Patent Document 1] Japanese Published Patent Application No. 2003-67693

SUMMARY OF THE INVENTION

However, in a semiconductor device capable of adjusting the resonancefrequency, such as the semiconductor device disclosed in Patent Document1, although once the gate voltage of a control transistor is set and theresonance frequency is set, the gate voltage of the control transistoris changed by a leakage current or the like of an element in a circuit,so that the resonance frequency differs from a desired resonancefrequency. For this reason, the readjustment of the resonance frequencyis necessary every time the resonance frequency differs from a desiredresonance frequency due to a leakage current or the like; therefore, theadjustment of the resonance frequency is complicated.

An object of one embodiment of the present invention is to simplify anadjustment of resonance frequency.

In one embodiment of the present invention, a coil, a capacitor, apassive element forming a resonance circuit when electrically connectedto the coil and the capacitor, and a control transistor that controlswhether the passive element is electrically connected to the coil andthe capacitor or not are provided. A memory circuit using a transistorwith low off-state current holds data, so that the gate voltage of thecontrol transistor is held. With the use of the memory circuit using thetransistor with low off-state current, change in the gate voltage of thecontrol transistor due to a leakage current or the like is suppressedand the resonance frequency is easily adjusted.

One embodiment of the present invention is a semiconductor deviceincluding a coil, a capacitor electrically connected to the coil inparallel, a passive element forming a resonance circuit with the coiland the capacitor by being electrically connected to the coil and thecapacitor in parallel, a first field effect transistor controllingwhether the passive element is electrically connected to the coil andthe capacitor in parallel or not, and a memory circuit. The memorycircuit includes a second field effect transistor which includes anoxide semiconductor layer where a channel is formed and in which a datasignal is input to one of a source and a drain. A gate voltage of thefirst field effect transistor is set depending on a voltage of the otherof the source and the drain of the second field effect transistor.

According to one embodiment of the present invention, the gate voltageof the control transistor can be easily set, so that the resonancefrequency can be easily adjusted.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A, 1B-1, 1B-2, and 1C show an example of a semiconductor device.

FIG. 2 shows an example of a semiconductor device.

FIG. 3 shows an example of a semiconductor device.

FIGS. 4A and 4B show examples of a semiconductor device.

FIGS. 5A and 5B show examples of a semiconductor device.

FIGS. 6A to 6D are schematic cross-sectional views showing structuralexamples of a transistor.

FIGS. 7A to 7E are schematic cross-sectional views showing an example ofa method for manufacturing a transistor.

FIG. 8 shows an example of a semiconductor device.

FIGS. 9A to 9C show examples of semiconductor devices.

FIGS. 10A to 10E show structures of an oxide material.

FIGS. 11A to 11C show a structure of an oxide material.

FIGS. 12A to 12C show a structure of an oxide material.

FIG. 13 shows gate voltage dependence of mobility obtained bycalculation.

FIGS. 14A to 14C each show gate voltage dependence of drain current andmobility obtained by calculation.

FIGS. 15A to 15C each show gate voltage dependence of drain current andmobility obtained by calculation.

FIGS. 16A to 16C each show gate voltage dependence of drain current andmobility obtained by calculation.

FIGS. 17A and 17B show cross-sectional structures of transistors usedfor calculation.

FIGS. 18A to 18C each show characteristics of a transistor using anoxide semiconductor film.

FIGS. 19A and 19B each show V_(g)-I_(d) characteristics of a transistorof Sample 1 after a BT test.

FIGS. 20A and 20B each show V_(g)-I_(d) characteristics of a transistorof Sample 2 after a BT test.

FIG. 21 shows XRD spectra of Sample A and Sample B.

FIG. 22 shows a relation between off-state current and substratetemperature in measurement of a transistor.

FIG. 23 shows V_(g) dependence of I_(d) and field-effect mobility.

FIGS. 24A and 24B show a relation between substrate temperature andthreshold voltage and a relation between substrate temperature and fieldeffect mobility, respectively.

FIGS. 25A and 25B are a top view of a semiconductor device and across-sectional view of the semiconductor device.

FIGS. 26A and 26B are a top view of a semiconductor device and across-sectional view of the semiconductor device.

DETAILED DESCRIPTION OF THE INVENTION

Examples of embodiments describing the present invention will bedescribed below with reference to the drawings. Note that it is easy forthose skilled in the art to change contents in an embodiment withoutdeparting from the spirit and the scope of the present invention. Thepresent invention is therefore not limited to the following descriptionof the embodiments.

Note that the contents of the embodiments can be combined with eachother as appropriate. In addition, the contents of the embodiments canbe replaced with each other.

Further, the ordinal numbers such as “first” and “second” are used toavoid confusion between components and do not limit the number of eachcomponent.

Embodiment 1

In this embodiment, an example of a semiconductor device in which theresonance frequency can be adjusted will be described.

An example of the semiconductor device in this embodiment will bedescribed with reference to FIGS. 1A, 1B-1, 1B-2, and 1C.

The semiconductor device shown in FIG. 1A includes an antenna (alsoreferred to as ANT) 101, a capacitor 102, a passive element (alsoreferred to as PE) 103, a transistor 104, and a memory circuit (alsoreferred to as OSMEM) 105.

Note that the transistor includes two terminals and a current controlterminal for controlling current flowing between the two terminals byvoltage applied. Note that without limitation to the transistor, in anelement, terminals between which current flows and the current iscontrolled are also referred to as current terminals. Two currentterminals are also referred to as a first current terminal and a secondcurrent terminal.

A field effect transistor can be used as the transistor, for example. Ina field effect transistor, a first current terminal, a second currentterminal, and a current control terminal are one of a terminal servingas a source and a drain, a terminal serving as the other of the sourceand the drain, and a terminal serving as a gate, respectively.

Voltage generally refers to a difference between electric potentials attwo points (also referred to as an electric potential difference).However, values of both a voltage and a potential are represented usingvolt (V) in a circuit diagram or the like in some cases, so that it isdifficult to discriminate between them. This is why in thisspecification, an electric potential difference between an electricpotential at one point and an electric potential to be the reference(also referred to as the reference electric potential) is used as avoltage at the point in some cases.

The capacitor includes a first electrode, a second electrode, and adielectric layer overlapping with the first electrode and the secondelectrode. An electrode functioning as an electrode in the capacitor isalso referred to as a capacitor electrode.

The antenna 101 has a function of a coil. The antenna 101 includes afirst terminal and a second terminal, for example. Note that a terminalincluded in the antenna 101 is also referred to as an antenna terminal.

The capacitor 102 is electrically connected to the antenna 101 inparallel. For example, a first capacitor electrode of the capacitor 102is electrically connected to a first antenna terminal of the antenna 101and a second capacitor electrode of the capacitor 102 is electricallyconnected to a second antenna terminal of the antenna 101. Note that aswitching element such as a transistor may be provided between theantenna 101 and one or both of the first capacitor electrode and thesecond capacitor electrode of the capacitor 102.

The passive element 103 forms a resonance circuit when electricallyconnected to the antenna 101 and the capacitor 102 in parallel. Forexample, one terminal of the passive element 103 is electricallyconnected to the first antenna terminal of the antenna 101.

As the passive element 103, a capacitor (e.g., a capacitor 131 in FIG.1B-1), an element functioning as a coil (e.g., an antenna 132 in FIG.1B-2), or the like can be used.

The transistor 104 has a function of controlling whether the passiveelement 103 is electrically connected to the antenna 101 and thecapacitor 102 in parallel or not, and is also referred to as a controltransistor. For example, when the transistor 104 is turned on, thepassive element 103 is electrically connected to the antenna 101 and thecapacitor 102 in parallel through a source and a drain of the transistor104. Further, one of the source and the drain of the transistor 104 iselectrically connected to one terminal of the passive element 103, andthe other of the source and the drain of the transistor 104 iselectrically connected to the second antenna terminal of the antenna101, for example.

The memory circuit 105 has a function of holding the gate voltage of thetransistor 104.

The memory circuit 105 includes a field effect transistor with lowoff-state current. A data signal is input to one of a source and a drainof the field effect transistor with low off-state current, and the gatevoltage of the transistor 104 is set depending on the voltage of theother of the source and the drain of the field effect transistor withlow off-state current. Note that the other of the source and the drainof the field effect transistor with low off-state current may beelectrically connected to the gate of the transistor 104. In thesemiconductor device in this embodiment, the operation of the memorycircuit 105 may be controlled in such a manner that a memory controlcircuit is provided, and a control signal and a data signal are inputwith the use of the memory control circuit.

As the field effect transistor with low off-state current, a fieldeffect transistor including an oxide semiconductor layer is given as anexample. The field effect transistor including an oxide semiconductorlayer has an off-state current lower than that of a conventionaltransistor layer of a semiconductor layer of silicon or the like. Theband gap of the oxide semiconductor layer is greater than that ofsilicon. The band gap of the oxide semiconductor layer is preferablygreater than or equal to 2 eV, more preferably greater than or equal to2.5 eV, further preferably greater than or equal to 3 eV. The oxidesemiconductor layer is an intrinsic (also referred to as an i-type) orsubstantially intrinsic semiconductor layer. The off-state current permicrometer of channel width of a transistor including the oxidesemiconductor layer is lower than or equal to 10 aA (1×10⁻¹⁷ A),preferably lower than or equal to 1 aA (1×10⁻¹⁸ A), more preferablylower than or equal to 10 zA (1×10⁻²⁰ A), further preferably lower thanor equal to 1 zA (1×10⁻²¹ A), still further preferably lower than orequal to 100 yA (1×10⁻²² A).

As the transistor 104, for example, it is possible to use a transistorincluding the oxide semiconductor layer or a transistor including asemiconductor layer which includes a semiconductor belonging to Group 14of the periodic table (e.g., silicon) and in which a channel is formed.

Note that another functional circuit may be provided so as to beelectrically connected to the antenna 101 in parallel. The functionalcircuit is a circuit that has a specific function when voltage isapplied.

Next, the operation of the semiconductor device shown in FIG. 1A will bedescribed as an operation example of the semiconductor device of thisembodiment.

In the semiconductor device shown in FIG. 1A, the resonance circuitincludes the coil (e.g., the antenna 101) and the capacitor. In thatcase, it is preferable to set the capacitance value of the capacitor 102so that a voltage needed to operate the semiconductor device issupplied. Since the semiconductor device shown in FIG. 1A is asemiconductor device with an electromagnetic induction method, a voltageis generated depending on the resonance frequency of the semiconductordevice when the antenna 101 receives an electric wave. The generatedvoltage is input to another functional circuit of the semiconductordevice. Further, data may be input to the semiconductor device when theantenna 101 receives an electric wave.

In addition, the resonance frequency of the semiconductor device can beadjusted by turning on or off the transistor 104. For example, the fieldeffect transistor with low off-state current in the memory circuit 105is turned on and a data signal is input to the memory circuit 105,whereby data of the data signal is held in the memory circuit 105 andthe gate voltage of the transistor 104 is set in response to the voltageof the data signal. Note that as the data signal, a digital data signalor an analogue data signal can be used. For example, when an analoguedata signal is used, the amount of change in a current flowing betweenthe source and the drain of the transistor 104 in an on state can be ananalogue value; thus, the resonance frequency of the semiconductordevice can be adjusted more accurately.

In that case, the resistance value of a channel of the transistor 104 ischanged depending on the gate voltage of the transistor 104, so that theresonance frequency of the semiconductor device is changed. Theresonance frequency f is expressed by the following formula.

$\begin{matrix}{f = \frac{1}{2\;\pi\sqrt{LC}}} & \lbrack {{Formula}\mspace{14mu} 1} \rbrack\end{matrix}$

L indicates the inductance of a coil or the like and C indicates thecapacitance of a capacitor or the like.

FIG. 1C is a graph showing the relation between the resonance frequencyand a voltage which is generated in the case where the passive element103 is an antenna functioning as a coil in the semiconductor device. Forexample, as shown in FIG. 1C, when the transistor 104 is in an off stateand the value of the resonance frequency is f1, the value of theresonance frequency can be changed from f1 to f2, with which a largevoltage is generated, by turning on the transistor 104. Further, whenthe transistor 104 is in an on state and the value of the resonancefrequency is f3, the value of the resonance frequency can be changedfrom f3 to f2, with which a large voltage is generated, by turning offthe transistor 104.

The above is the description of the operation example of thesemiconductor device shown in FIG. 1A.

Note that as shown in FIG. 2, for example, a plurality of circuits eachincluding the passive element 103, the transistor 104, and the memorycircuit 105 (also referred to as resonance frequency adjustmentcircuits) may be provided. A semiconductor device shown in FIG. 2includes the antenna 101, the n (n is a natural number greater than orequal to two) passive elements 103 (passive elements 103_1 to 103_n),the n transistors 104 (transistors 104_1 to 104_n), and the n memorycircuits 105 (memory circuits 105_1 to 105 n).

The m-th (m is a natural number of 1 to n) transistor 104_m controlswhether the m-th passive element 103_m and the antenna 101 areelectrically connected to each other in parallel or not. The gatevoltage of the m-th transistor 104_m is held by the m-th memory circuit105_m. Note that data held in each memory circuit 105 may be setindividually.

When the plurality of resonance frequency adjustment circuits isprovided, the amount of change in the resonance frequency of thesemiconductor device can be an analogue value, so that the resonancefrequency of the semiconductor device can be adjusted more accurately.

As described with reference to FIGS. 1A, 1B-1, 1B-2, and 1C and FIG. 2,in an example of the semiconductor device in this embodiment, whetherthe passive element forms the resonance circuit with another element ornot is controlled by controlling an on state or an off state of thecontrol transistor, whereby the resonance frequency of the semiconductordevice can be changed as appropriate. Consequently, for example, in thecase where the resonance frequency of the semiconductor device differsfrom a desired value when the semiconductor device is manufactured, theresonance frequency can be adjusted to be a desired value.

Moreover, in an example of the semiconductor device in this embodiment,the memory circuit includes the transistor with low off-state current,so that the gate voltage of the control transistor can be set inresponse to data held in the memory circuit just by writing the data tothe memory circuit. Further, data in the memory circuit can be easilyrewritten. The memory circuit including the transistor with lowoff-state current has a small leakage current and can hold data for along time even when power is not supplied. Thus, the number of times ofsetting again the gate voltage of the control transistor can be reduced,so that the resonance frequency of the semiconductor device can beeasily set. In addition, power consumption of the semiconductor devicecan be reduced.

Embodiment 2

In this embodiment, an example of the semiconductor device described inEmbodiment 1 will be described.

An example of a semiconductor device in this embodiment will bedescribed with reference to FIG. 3. Note that in FIG. 3, the descriptionof the semiconductor device shown in FIG. 1A is used as appropriate forcomponents denoted by the same reference numerals as those in thesemiconductor device shown in FIG. 1A.

The semiconductor device shown in FIG. 3 includes the antenna 101, thecapacitor 102, the passive element 103, the transistor 104, and thememory circuit 105, similarly to the semiconductor device shown in FIG.1A.

The antenna 101 functions as a coil.

The capacitor 102 is electrically connected to the antenna 101 inparallel.

The passive element 103 forms a resonance circuit when electricallyconnected to the antenna 101 and the capacitor 102 in parallel.

The transistor 104 has a function of controlling whether the passiveelement 103 is electrically connected to the antenna 101 and thecapacitor 102 in parallel or not. For example, one of the source and thedrain of the transistor 104 is electrically connected to the passiveelement 103.

Moreover, the memory circuit 105 shown in FIG. 3 includes a transistor201 and a capacitor 202.

A data signal is input to one of a source and a drain of the transistor201 and the other of the source and the drain of the transistor 201 iselectrically connected to the gate of the transistor 104.

As the transistor 201, a field effect transistor with low off-statecurrent, such as the transistor including an oxide semiconductor layerdescribed in the above embodiment, can be used.

Further, for example, the operation of the transistor 201 may becontrolled in such a manner that a control signal is supplied to a gateof the transistor 201 with the use of an arithmetic circuit, a memory,and the like, and a data signal is supplied to the one of the source andthe drain of the transistor 201.

A first capacitor electrode of the capacitor 202 is electricallyconnected to the gate of the transistor 104. A second capacitorelectrode of the capacitor 202 is supplied with a given voltage or thesecond capacitor electrode of the capacitor 202 is grounded. Note thatthe capacitor 202 is not necessarily provided.

Next, the operation of the semiconductor device shown in FIG. 3 will bedescribed as an operation example of the semiconductor device of thisembodiment.

In the semiconductor device shown in FIG. 3, when the antenna 101receives an electric wave, a voltage is generated depending on theresonance frequency of the semiconductor device. The generated voltageis input to another functional circuit in the semiconductor device, forexample.

In addition, the resonance frequency of the semiconductor device can beadjusted by turning on or off the transistor 104.

When the gate voltage of the transistor 104 is set, the transistor 201is turned on.

When the transistor 201 is in an on state, the gate voltage of thetransistor 104 is equal to the voltage of a data signal.

Then, the transistor 201 is turned off. Since the transistor 201 has lowoff-state current, the gate voltage of the transistor 104 can be held byturning off the transistor 201. Thus, the gate voltage of the transistor104 can be set.

The above is the description of the operation example of thesemiconductor device shown in FIG. 3.

As described with reference to FIG. 3, in an example of thesemiconductor device in this embodiment, whether the passive elementforms the resonance circuit with another element or not is controlled bycontrolling an on state or an off state of the control transistor,whereby the resonance frequency of the semiconductor device can bechanged as appropriate. Consequently, for example, in the case where theresonance frequency of the semiconductor device differs from a desiredvalue when the semiconductor device is manufactured, the resonancefrequency can be adjusted to be a desired value.

Moreover, in an example of the semiconductor device in this embodiment,the memory circuit includes the transistor with low off-state current,so that the gate voltage of the control transistor can be set inresponse to data held in the memory circuit just by writing the data tothe memory circuit. Further, data in the memory circuit can be easilyrewritten. In the memory circuit including the transistor with lowoff-state current, data (voltage) that is held does not changesemipermanently. In other words, the memory circuit including thetransistor with low off-state current has a small leakage current andcan hold data for a long time even when power is not supplied. Thus, thenumber of times of setting again the gate voltage of the controltransistor can be reduced, so that the resonance frequency of thesemiconductor device can be easily set. In addition, power consumptionof the semiconductor device can be reduced.

Embodiment 3

In this embodiment, another example of the semiconductor devicedescribed in Embodiment 1 will be described.

Examples of memory circuits in this embodiment will be described withreference to FIGS. 4A and 4B. FIGS. 4A and 4B are diagrams fordescribing the memory circuits in this embodiment. Note that in FIGS. 4Aand 4B, the description of the semiconductor device shown in FIG. 1A isused as appropriate for components denoted by the same referencenumerals as those in the semiconductor device shown in FIG. 1A.

Semiconductor devices shown in FIGS. 4A and 4B each include the antenna101, the capacitor 102, the passive element 103, the transistor 104, andthe memory circuit 105 similarly to the semiconductor device shown inFIG. 1A.

The antenna 101 functions as a coil.

The capacitor 102 is electrically connected to the antenna 101 inparallel.

The passive element 103 forms a resonance circuit when electricallyconnected to the antenna 101 and the capacitor 102 in parallel.

The transistor 104 has a function of controlling whether the passiveelement 103 is electrically connected to the antenna 101 and thecapacitor 102 in parallel or not. For example, one of the source and thedrain of the transistor 104 is electrically connected to the passiveelement 103.

Moreover, the memory circuits 105 shown in FIGS. 4A and 4B each includea transistor 301, a capacitor 302, a transistor 303, and an electronicelement (also referred to as an LD) 304 serving as a load.

A data signal is input to one of a source and a drain of the transistor301.

As the transistor 301, a field effect transistor with low off-statecurrent, such as the transistor including an oxide semiconductor layerdescribed in the above embodiment, can be used.

Further, for example, the operation of the transistor 301 may becontrolled in such a manner that a control signal is supplied to a gateof the transistor 301 with the use of an arithmetic circuit, a memory,and the like, and a data signal is supplied to one of a source and adrain of the transistor 301.

A first capacitor electrode of the capacitor 302 is electricallyconnected to the other of the source and the drain of the transistor301. A given voltage is applied to a second capacitor electrode of thecapacitor 302. Further, one embodiment of the present invention is notlimited to this, and the second capacitor electrode of the capacitor 302may be grounded. Note that the capacitor 302 is not necessarilyprovided.

The voltage of one of a source and a drain of the transistor 303 ischanged depending on an electric wave received by the antenna 101. Theother of the source and the drain of the transistor 303 is electricallyconnected to the gate of the transistor 104. A gate of the transistor303 is electrically connected to the other of the source and the drainof the transistor 301. For example, the one of the source and the drainof the transistor 303 is electrically connected to the first antennaterminal of the antenna 101. The other of the source and the drain ofthe transistor 303 is electrically connected to the second antennaterminal of the antenna 101 through the electronic element 304 servingas a load.

It is preferable to use, for example, a p-channel transistor as thetransistor 303. As the transistor 303, a transistor that includes asemiconductor layer including a semiconductor (e.g., silicon) belongingto Group 14 of the periodic table can be used, for example.

The electronic element 304 serving as a load has a function of resettingthe voltage of the other of the source and the drain of the transistor303 to have a reference value. As examples of the electronic element 304serving as a load, a resistor, a diode, and a switching element aregiven. As a switching element, a transistor or the like is given, forexample. Note that the electronic element 304 serving as a load is notnecessarily provided and parasitic resistance or the like may be usedinstead of the electronic element 304 serving as a load.

The semiconductor device shown in FIG. 4B includes a rectifier circuit106. The rectifier circuit 106 has a function of rectifying a voltagegenerated by receiving an electric wave by the antenna 101. Note thatalthough the rectifier circuit 106 is not necessarily provided,deterioration of the transistor 303 due to application of voltage can besuppressed with the rectifier circuit 106.

Next, the operation of the semiconductor device shown in FIG. 4A will bedescribed as an operation example of the semiconductor device of thisembodiment.

In the semiconductor device shown in FIG. 4A, when the antenna 101receives an electric wave, a voltage is generated depending on theresonance frequency of the semiconductor device. The generated voltageis input to another functional circuit of the semiconductor device, forexample.

Moreover, in the semiconductor device shown in FIG. 4A, when a voltagewith which an element is broken is supplied by receiving an electricwave by the antenna 101, the gate voltage of the transistor 104 ischanged and the resistance value of the channel of the transistor 104 ischanged, so that the resonance frequency can be changed. An example ofthe above method will be described.

First, the transistor 301 is turned on.

When the transistor 301 is in an on state, the gate voltage of thetransistor 303 is equal to the voltage of a data signal. The voltage ofthe data signal is set depending on the value of the voltage with whichan element is broken.

Then, the transistor 301 is turned off. Since the transistor 301 is atransistor with low off-state current, the gate voltage of thetransistor 303 can be held by turning off the transistor 301. Thus, thegate voltage of the transistor 303 can be set.

In that case, when a value of a voltage generated by receiving anelectric wave by the antenna 101 is not a voltage with which an elementis broken, the transistor 303 is in an off state. At this time, the gatevoltage of the transistor 104 is reset to the reference value by theelectronic element 304 serving as a load.

When a value of a voltage generated by receiving an electric wave by theantenna 101 is a voltage with which an element is broken, the transistor303 is turned on depending on the voltage between the gate and thesource of the transistor 303. When the transistor 303 is turned on, thegate voltage of the transistor 104 is changed. Consequently, theresistance value of the channel of the transistor 104 is changeddepending on the gate voltage of the transistor 104 and the transistor104 is turned on, so that the resonance frequency is changed.

The above is the description of the operation example of thesemiconductor device shown in FIG. 4A.

As described with reference to FIGS. 4A and 4B, in an example of thesemiconductor device in this embodiment, whether the passive elementforms the resonance circuit with another element or not is controlled bycontrolling an on state or an off state of the control transistor,whereby the resonance frequency of the semiconductor device can bechanged as appropriate. Consequently, for example, in the case where theresonance frequency of the semiconductor device differs from a desiredvalue when the semiconductor device is manufactured, the resonancefrequency can be adjusted to be a desired value.

Moreover, in an example of the semiconductor device in this embodiment,the memory circuit includes the transistor with low off-state current,so that the gate voltage of the control transistor can be set inresponse to data held in the memory circuit just by writing the data tothe memory circuit. Further, data in the memory circuit can be easilyrewritten. In the memory circuit including the transistor with lowoff-state current, data (voltage) that is held does not changesemipermanently. In other words, the memory circuit including thetransistor with low off-state current has a small leakage current andcan hold data for a long time even when power is not supplied. Thus, thenumber of times of setting again the gate voltage of the controltransistor can be reduced, so that the resonance frequency of thesemiconductor device can be easily set. In addition, power consumptionof the semiconductor device can be reduced.

In an example of the semiconductor device in this embodiment, theresonance frequency can be changed depending on a voltage supplied byreceiving an electric wave by the antenna. Thus, when a voltage withwhich an element might be broken is applied, the value of a generatedvoltage can be adjusted by changing the resonance frequency.Consequently, a circuit including the passive element and the controltransistor can function as a protection circuit, and the reliability ofthe semiconductor device can be improved.

Embodiment 4

In this embodiment, another example of the semiconductor devicedescribed in Embodiment 1 will be described.

Examples of semiconductor devices in this embodiment will be describedwith reference to FIGS. 5A and 5B. FIGS. 5A and 5B are diagrams fordescribing the examples of the semiconductor devices in this embodiment.Note that in FIGS. 5A and 5B, the description of the semiconductordevice shown in FIG. 1A is used as appropriate for components denoted bythe same reference numerals as those in the semiconductor device shownin FIG. 1A.

The semiconductor devices shown in FIGS. 5A and 5B each include theantenna 101, the capacitor 102, the passive element 103, the transistor104, and the memory circuit 105 as in the semiconductor device shown inFIG. 1A.

The antenna 101 functions as a coil.

The capacitor 102 is electrically connected to the antenna 101 inparallel.

The passive element 103 forms a resonance circuit when electricallyconnected to the antenna 101 and the capacitor 102 in parallel.

The transistor 104 has a function of controlling whether the passiveelement 103 is electrically connected to the antenna 101 and thecapacitor 102 in parallel or not. For example, one of the source and thedrain of the transistor 104 is electrically connected to the passiveelement 103.

Moreover, the memory circuit 105 includes a transistor 401, a capacitor402, a transistor 403, an electronic element 404 serving as a load, acapacitor 405, and a transistor 406.

A data signal D1 is input to one of a source and a drain of thetransistor 401.

As the transistor 401, a field effect transistor with low off-statecurrent, such as the transistor including an oxide semiconductor layerdescribed in the above embodiment, can be used.

Further, for example, the operation of the transistor 401 may becontrolled in such a manner that a control signal CTL1 is supplied to agate of the transistor 401 with the use of an arithmetic circuit, amemory, and the like, and the data signal D1 is supplied to the one ofthe source and the drain of the transistor 401.

A first capacitor electrode of the capacitor 402 is electricallyconnected to the other of the source and the drain of the transistor401. Note that the capacitor 402 is not necessarily provided.

The voltage of one of a source and a drain of the transistor 403 ischanged depending on an electric wave received by the antenna 101, and agate of the transistor 403 is electrically connected to the other of thesource and the drain of the transistor 401. For example, the one of thesource and the drain of the transistor 403 is electrically connected tothe first antenna terminal of the antenna 101, the other of the sourceand the drain of the transistor 403 is electrically connected to thesecond antenna terminal of the antenna 101 through the electronicelement 404 serving as a load.

It is preferable to use, for example, a p-channel transistor as thetransistor 403. As the transistor 403, a transistor having asemiconductor layer including a semiconductor (e.g., silicon) belongingto Group 14 of the periodic table can be used, for example.

The electronic element 404 serving as a load has a function of resettingthe voltage of the other of the source and the drain of the transistor403 to have a reference value. As examples of the electronic element 404serving as a load, a resistor, a diode, and a switching element aregiven. As a switching element, a transistor or the like is given, forexample. Note that the electronic element 404 serving as a load is notnecessarily provided and parasitic resistance or the like may be usedinstead of the electronic element 404 serving as a load.

A first capacitor electrode of the capacitor 405 is electricallyconnected to the other of the source and the drain of the transistor403. A second capacitor electrode of the capacitor 405 is electricallyconnected to the gate of the transistor 104.

A data signal, which is the same as a data signal input to one of thesource and the drain of the transistor 401, is input to one of thesource and the drain of the transistor 406 and the other of the sourceand the drain of the transistor 406 is electrically connected to thegate of the transistor 104. Note that a data signal different from thedata signal input to the one of the source and the drain of thetransistor 401 (here, a data signal D2) may be input to the one of thesource and the drain of the transistor 406.

As the transistor 406, a field effect transistor with low off-statecurrent, such as the transistor including an oxide semiconductor layerdescribed in the above embodiment, can be used.

Further, for example, the operation of the transistor 401 may becontrolled in such a manner that a control signal CTL1, which is thesame as the control signal CTL1 supplied to the gate of the transistor401, is supplied to the gate of the transistor 406 with the use of anarithmetic circuit, a memory, and the like, and a data signal D1 or adata signal D2 is supplied to the one of the source and the drain of thetransistor 401. A control signal different from the control signal inputto the gate of the transistor 401 (here, a control signal CTL2) may besupplied to the gate of the transistor 406.

The semiconductor device shown in FIG. 5B includes the rectifier circuit106. The rectifier circuit 106 has a function of rectifying a voltagegenerated by receiving an electric wave by the antenna 101. Note thatalthough the rectifier circuit 106 is not necessarily provided,deterioration of the transistor 403 due to application of voltage can besuppressed with the rectifier circuit 106.

Next, the operation of the semiconductor device shown in FIG. 5A will bedescribed as an operation example of the semiconductor devices shown inFIGS. 5A and 5B.

In the semiconductor device shown in FIG. 5A, when the antenna 101receives an electric wave, a voltage is generated depending on theresonance frequency of the semiconductor device. The generated voltageis input to another functional circuit of the semiconductor device, forexample.

Moreover, in the semiconductor device shown in FIG. 5A, when the gatevoltage of the transistor 104 is set and a voltage with which an elementmight be broken is supplied by receiving an electric wave by the antenna101, the gate voltage of the transistor 104 is changed and theresistance value of the channel of the transistor 104 is changed, sothat the resonance frequency is changed, and then an electric wave isreceived by the antenna 101; thus, the gate voltage of the transistor104 can be returned to a voltage that is previously set when a voltagewith which an element is not broken is supplied. An example of the abovemethod will be described.

First, the transistor 401 and the transistor 406 are turned on.

When the transistor 401 is in an on state, the gate voltage of thetransistor 403 is equal to the voltage of a data signal D1.

When the transistor 406 is in an on state, the gate voltage of thetransistor 104 is equal to the voltage of a data signal D1 or a datasignal D2.

Note that when a value of the voltage of the data signal D1 is greaterthan a given value, the gate voltage of the transistor 403 is preferablyset so that the transistor 403 is turned off. For example, in the casewhere the transistor 104 is an n-channel transistor and the transistor403 is a p-channel transistor, the gate voltages of the transistor 104and the transistor 403 are set to be greater than or equal to a powersupply voltage. Thus, when the gate voltage of the transistor 104 isgreater than or equal to a given value, application of a voltage morethan necessary to the gate of the transistor 104 can be prevented evenwhen a voltage with which an element might be broken is supplied byreceiving an electric wave by the antenna 101. Further, when the gatevoltage of the transistor 104 is set again, the gate voltage of thetransistor 403 may be set again in response to the value of the datasignal D1.

Then, the transistor 401 and the transistor 406 are turned off. Sincethe transistor 401 and the transistor 406 are transistors with lowoff-state current, the gate voltage of the transistor 403 can be held byturning off the transistor 401 and the transistor 406. Thus, the gatevoltage of the transistor 403 can be set.

In that case, when a voltage with which an element is not broken issupplied by receiving an electric wave by the antenna 101, the value ofthe gate voltage of the transistor 104 becomes a value depending on aninput data signal. At this time, the gate voltage of the transistor 104is reset to the reference value by the electronic element 404 serving asa load.

Further, in the case where a value of the data signal D1 is a value thatthe transistor 104 is turned off and a value of a voltage supplied byreceiving an electric wave by the antenna 101 is a value with which anelement is broken, the transistor 403 is turned on depending on thevoltage between the gate and one of the source and the drain of thetransistor 403. In addition, when the transistor 403 is turned on, thevoltage of the first capacitor electrode of the capacitor 405 is changeddepending on the resistance value of a channel of the transistor 403.Moreover, the voltage of the second capacitor electrode of the capacitor405 is changed depending on the change of the voltage of the firstcapacitor electrode because of the capacitive coupling, so that the gatevoltage of the transistor 104 is changed. Consequently, the resistancevalue of the channel of the transistor 104 is changed depending on thegate voltage of the transistor 104 and the transistor 104 is turned on,so that the resonance frequency is changed.

Then, when a voltage with which an element is not broken is supplied byreceiving an electric wave by the antenna 101, the voltage of the firstcapacitor electrode of the capacitor 405 is changed and the transistor403 is turned off, so that the gate voltage of the transistor 104 isreturned to the normal value. At this time, the gate voltage of thetransistor 104 is reset to the reference value by the electronic element404 serving as a load.

The above is the description of the operation example of thesemiconductor device shown in FIG. 5A.

As described with reference to FIGS. 5A and 5B, in an example of thesemiconductor device in this embodiment, whether the passive elementforms the resonance circuit with another element or not is controlled bycontrolling an on state or an off state of the control transistor,whereby the resonance frequency of the semiconductor device can bechanged as appropriate. Consequently, for example, in the case where theresonance frequency of the semiconductor device differs from a desiredvalue when the semiconductor device is manufactured, the resonancefrequency can be adjusted to be a desired value.

Moreover, in an example of the semiconductor device in this embodiment,the memory circuit includes the transistor with low off-state current,so that the gate voltage of the control transistor can be set inresponse to data held in the memory circuit just by writing the data tothe memory circuit. Further, data in the memory circuit can be easilyrewritten. In the memory circuit including the transistor with lowoff-state current, data (voltage) that is held does not changesemipermanently. In other words, the memory circuit including thetransistor with low off-state current has a small leakage current andcan hold data for a long time even when power is not supplied. Thus, thenumber of times of setting again the gate voltage of the controltransistor can be reduced, so that the resonance frequency of thesemiconductor device can be easily set. In addition, power consumptionof the semiconductor device can be reduced.

In an example of the semiconductor device in this embodiment, when avoltage with which an element might be broken is applied, resonancefrequency is changed by utilizing a capacitor, and then the resonancefrequency can be returned to a voltage that is previously set when avoltage with which an element is not broken is supplied. Therefore, acircuit including the passive element and the control transistor canfunction as a protection circuit, and the reliability of thesemiconductor device can be improved.

Embodiment 5

In this embodiment, examples of a transistor including an oxidesemiconductor layer which can be used for the semiconductor device inthe above embodiment will be described.

Structural examples of the transistor including the oxide semiconductorlayer will be described with reference to FIGS. 6A to 6D. FIGS. 6A to 6Dare schematic cross-sectional views each showing the structural exampleof the transistor in this embodiment.

A transistor shown in FIG. 6A includes a conductive layer 601_A, aninsulating layer 602_A, a semiconductor layer 603_A, a conductive layer605 a_A, a conductive layer 605 b_A, an insulating layer 606_A, and aconductive layer 608_A.

The conductive layer 601_A is provided over an element formation layer600_A.

The insulating layer 602_A is provided over the conductive layer 601_A.

The semiconductor layer 603_A overlaps with the conductive layer 601_Awith the insulating layer 602_A provided therebetween.

The conductive layer 605 a_A and the conductive layer 605 b_A are eachprovided over the semiconductor layer 603_A and electrically connectedto the semiconductor layer 603_A.

The insulating layer 606_A is provided over the semiconductor layer603_A, the conductive layer 605 a_A, and the conductive layer 605 b_A.

The conductive layer 608_A overlaps with the semiconductor layer 603_Awith the insulating layer 606_A provided therebetween.

Note that one of the conductive layer 601_A and the conductive layer608_A is not necessarily provided. In the case where the conductivelayer 608_A is not provided, the insulating layer 606_A is notnecessarily provided.

A transistor shown in FIG. 6B includes a conductive layer 601_B, aninsulating layer 602_B, a semiconductor layer 603_B, a conductive layer605 a_B, a conductive layer 605 b_B, an insulating layer 606_B, and aconductive layer 608_B.

The conductive layer 601_B is provided over an element formation layer600_B.

The insulating layer 602_B is provided over the conductive layer 601_B.

The conductive layer 605 a_B and the conductive layer 605 b_B are eachprovided over part of the insulating layer 602_B.

The semiconductor layer 603_B is provided over the conductive layer 605a_B and the conductive layer 605 b_B and electrically connected to theconductive layer 605 a_B and the conductive layer 605 b_B. Further, thesemiconductor layer 603_B overlaps with the conductive layer 601_B withthe insulating layer 602_B provided therebetween.

The insulating layer 606_B is provided over the semiconductor layer603_B, the conductive layer 605 a_B, and the conductive layer 605 b_B.

The conductive layer 608_B overlaps with the semiconductor layer 603_Bwith the insulating layer 606_B provided therebetween.

Note that one of the conductive layer 601_B and the conductive layer608_B is not necessarily provided. In the case where the conductivelayer 608_B is not provided, the insulating layer 606_B is notnecessarily provided.

A transistor shown in FIG. 6C includes a conductive layer 601_C, aninsulating layer 602_C, a semiconductor layer 603_C, a conductive layer605 a_C, and a conductive layer 605 b_C.

The semiconductor layer 603_C includes a region 604 a_C and a region 604b_C. The region 604 a_C and the region 604 b_C are separated from eachother and a dopant is added to each of the regions. A region between theregion 604 a_C and the region 604 b_C serves as a channel formationregion. The semiconductor layer 603_C is provided over an elementformation layer 600_C.

The conductive layer 605 a C and the conductive layer 605 b_C areprovided over the semiconductor layer 603_C and electrically connectedto the semiconductor layer 603_C. Side surfaces of the conductive layer605 a_C and the conductive layer 605 b_C are tapered.

The conductive layer 605 a_C overlaps with part of the region 604 a_C;however, the present invention is not necessarily limited to this. Whenthe conductive layer 605 a_C partly overlaps with the region 604 a_C,resistance between the conductive layer 605 a_C and the region 604 a_Ccan be low. Further, an entire region in the semiconductor layer 603_C,which overlaps with the conductive layer 605 a_C may be the region 604a_C.

The conductive layer 605 b_C overlaps with part of the region 604 b_C;however, the present invention is not limited to this. When theconductive layer 605 b_C partly overlaps with the region 604 b_C,resistance between the conductive layer 605 b_C and the region 604 b_Ccan be low. Further, an entire region in the semiconductor layer 603_C,which overlaps with the conductive layer 605 b_C may be the region 604b_C.

The insulating layer 602_C is provided over the semiconductor layer603_C, the conductive layer 605 a_C, and the conductive layer 605 b_C.

The conductive layer 601_C overlaps with the semiconductor layer 603_Cwith the insulating layer 602_C provided therebetween. A region in thesemiconductor layer 603_C, which overlaps with the conductive layer601_C with the insulating layer 602_C provided therebetween serves asthe channel formation region.

A transistor shown in FIG. 6D includes a conductive layer 601_D, aninsulating layer 602_D, a semiconductor layer 603_D, a conductive layer605 a_D, and a conductive layer 605 b_D.

The conductive layer 605 a_D and the conductive layer 605 b_D areprovided over an element formation layer 600_D. Side surfaces of theconductive layer 605 a_D and the conductive layer 605 b_D are tapered.

The semiconductor layer 603_D includes a region 604 a_D and a region 604b_D. The region 604 a_D and the region 604 b_D are separated from eachother and a dopant is added to each of the regions. A region between theregion 604 a_D and the region 604 b_D serves as a channel formationregion. The semiconductor layer 603_D is provided over the conductivelayer 605 a_D, the conductive layer 605 b_D, and the element formationlayer 600_D and electrically connected to the conductive layer 605 a_Dand the conductive layer 605 b_D.

The region 604 a_D is electrically connected to the conductive layer 605a_D.

The region 604 b_D is electrically connected to the conductive layer 605b_D.

The insulating layer 602_D is provided over the semiconductor layer603_D.

The conductive layer 601_D overlaps with the semiconductor layer 603_Dwith the insulating layer 602_D provided therebetween. A region in thesemiconductor layer 603_D, which overlaps with the conductive layer601_D with the insulating layer 602_D provided therebetween serves asthe channel formation region.

Next, the components shown in FIGS. 6A to 6D will be described.

As the element formation layers 600_A to 600_D, insulating layers,substrates having insulating surfaces, or the like can be used, forexample. Further, layers over which elements are formed in advance canbe used as the element formation layers 600_A to 600_D.

Each of the conductive layers 601_A to 601_D has a function of a gate ofthe transistor. Note that a layer having a function of a gate of thetransistor can be called a gate electrode or a gate wiring.

As the conductive layers 601_A to 601_D, a layer of a metal materialsuch as molybdenum, titanium, chromium, tantalum, tungsten, aluminum,copper, neodymium, or scandium or an alloy material containing any ofthese materials as a main component can be used, for example.Alternatively, the conductive layers 601_A to 601_D can be formed bystacking layers of materials that can be used for the conductive layers601_A to 601_D.

Each of the insulating layers 602_A to 602_D has a function of a gateinsulating layer of the transistor.

Each of the insulating layers 602_A to 602_D can be, for example, asilicon oxide layer, a silicon nitride layer, a silicon oxynitridelayer, a silicon nitride oxide layer, an aluminum oxide layer, analuminum nitride layer, an aluminum oxynitride layer, an aluminumnitride oxide layer, or a hafnium oxide layer. Each of the insulatinglayers 602_A to 602_D can be a stack of layers of a material that can beused for the insulating layers 602_A to 602_D.

Alternatively, the insulating layers 602_A to 602_D, an insulating layerof a material containing, for example, an element that belongs to Group13 in the periodic table and oxygen can be used. When the semiconductorlayers 603_A to 603_D contain an element that belongs to Group 13, theuse of insulating layers each containing an element that belongs toGroup 13 as insulating layers in contact with the semiconductor layers603_A to 603_D makes the state of interfaces between the insulatinglayers and the oxide semiconductor layers favorable.

Examples of the material containing an element that belongs to Group 13include gallium oxide, aluminum oxide, aluminum gallium oxide, andgallium aluminum oxide. Note that aluminum gallium oxide refers to asubstance in which the amount of aluminum is larger than that of galliumin atomic percent, and gallium aluminum oxide refers to a substance inwhich the amount of gallium is larger than or equal to that of aluminumin atomic percent. As the insulating layers 602_A to 602_D, a materialrepresented by Al₂O_(x) (x=3+α, where α is larger than 0 and smallerthan 1), Ga₂O_(x) (x=3+α, where α is larger than 0 and smaller than 1),or Ga_(x)Al_(2-x)O_(3+α) (x is larger than 0 and smaller than 2 and α islarger than 0 and smaller than 1) can be used, for example.

Each of the insulating layers 602_A to 602_D can be a stack of layers ofa material which can be used for the insulating layers 602_A to 602_D.For example, the insulating layers 602_A to 602_D can be a stack oflayers containing gallium oxide represented by Ga_(x)O₂. Alternatively,the insulating layers 602_A to 602_D may be a stack of layers of aninsulating layer containing gallium oxide represented by Ga_(x)O₂ and aninsulating layer containing aluminum oxide represented by Al₂O_(x).

Each of the oxide semiconductor layers 603_A to 603_D functions as alayer in which a channel of the transistor is formed. An oxidesemiconductor used for the semiconductor layers 603_A to 603_Dpreferably contains at least indium (In) or zinc (Zn). In particular, Inand Zn are preferably contained. As a stabilizer for reducing variationin electric characteristics of a transistor using the oxidesemiconductor, gallium (Ga) is preferably additionally contained. Tin(Sn) is preferably contained as a stabilizer. Hafnium (Hf) is preferablycontained as a stabilizer. Aluminum (Al) is preferably contained as astabilizer.

As another stabilizer, one or plural kinds of lanthanoid such aslanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium(Sm), europium (Eu), gadolinium (Gd), terbium (Tb), dysprosium (Dy),holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), or lutetium(Lu) may be contained.

As the oxide semiconductor, for example, an indium oxide; a tin oxide; azinc oxide; a two-component metal oxide such as an In—Zn-based oxide, aSn—Zn-based oxide, an Al—Zn-based oxide, a Zn—Mg-based oxide, aSn—Mg-based oxide, an In—Mg-based oxide, or an In—Ga-based oxide; athree-component metal oxide such as an In—Ga—Zn-based oxide (alsoreferred to as IGZO), an In—Al—Zn-based oxide, an In—Sn—Zn-based oxide,a Sn—Ga—Zn-based oxide, an Al—Ga—Zn-based oxide, a Sn—Al—Zn-based oxide,an In—Hf—Zn-based oxide, an In—La—Zn-based oxide, an In—Ce—Zn-basedoxide, an In—Pr—Zn-based oxide, an In—Nd—Zn-based oxide, anIn—Sm—Zn-based oxide, an In—Eu—Zn-based oxide, an In—Gd—Zn-based oxide,an In—Tb—Zn-based oxide, an In—Dy—Zn-based oxide, an In—Ho—Zn-basedoxide, an In—Er—Zn-based oxide, an In—Tm—Zn-based oxide, anIn—Yb—Zn-based oxide, or an In—Lu—Zn-based oxide; or a four-componentmetal oxide such as an In—Sn—Ga—Zn-based oxide, an In—Hf—Ga—Zn-basedoxide, an In—Al—Ga—Zn-based oxide, an In—Sn—Al—Zn-based oxide, anIn—Sn—Hf—Zn-based oxide, or an In—Hf—Al—Zn-based oxide can be used.

Note that here, for example, an “In—Ga—Zn-based oxide” refers to anoxide containing In, Ga, and Zn as its main component and there is noparticular limitation on the ratio of In:Ga:Zn. The In—Ga—Zn-based oxidemay contain a metal element other than In, Ga, and Zn.

A material represented by InMO₃(ZnO)_(m) (m>0 is satisfied, and m is notan integer) may be used as an oxide semiconductor. Note that Mrepresents one or more metal elements selected from Ga, Fe, Mn, and Co.As the oxide semiconductor, a material expressed by a chemical formula,In₃SnO₅(ZnO), (n>0, n is an integer) may be used.

For another example, an In—Ga—Zn-based oxide with an atomic ratio ofIn:Ga:Zn=1:1:1 (=⅓:⅓:⅓) or In:Ga:Zn=2:2:1 (=⅖:⅖:⅕), or any of oxideswhose composition is in the neighborhood of the above compositions canbe used. Alternatively, an In—Sn—Zn-based oxide with an atomic ratio ofIn:Sn:Zn=1:1:1 (=⅓:⅓:⅓), In:Sn:Zn=2:1:3 (=⅓:⅙:½), or In:Sn:Zn=2:1:5(=¼:⅛:⅝), or any of oxides whose composition is in the neighborhood ofthe above compositions may be used.

However, without limitation to the materials given above, a materialwith an appropriate composition may be used depending on neededsemiconductor characteristics (e.g., mobility, threshold voltage, andvariation). In order to obtain the needed semiconductor characteristics,it is preferable that the carrier density, the impurity concentration,the defect density, the atomic ratio between a metal element and oxygen,the interatomic distance, the density, and the like be set toappropriate values.

For example, high mobility can be obtained relatively easily in the caseof using an In—Sn—Zn oxide. However, mobility can be increased byreducing the defect density in a bulk also in the case of using anIn—Ga—Zn-based oxide.

Note that the case where the composition of an oxide having an atomicratio of In:Ga:Zn=a:b:c (a+b+c=1) is in the neighborhood of thecomposition of an oxide having an atomic ratio of In:Ga:Zn=A:B:C(A+B+C=1) means that a, b, and c satisfy the following relation:(a−A)²+(b−B)²+(c−C)²≤r², and r may be 0.05, for example. The sameapplies to other oxides.

The oxide semiconductor may be either single crystal ornon-single-crystal. In the latter case, the oxide semiconductor may beeither amorphous or polycrystal. Further, the oxide semiconductor mayhave either an amorphous structure including a portion havingcrystallinity or a non-amorphous structure.

In an oxide semiconductor in an amorphous state, a flat surface can beobtained with relative ease, so that when a transistor is manufacturedwith the use of the oxide semiconductor, interface scattering can bereduced, and relatively high mobility can be obtained with relativeease.

In an oxide semiconductor having crystallinity, defects in the bulk canbe further reduced and when a surface flatness is improved, mobilityhigher than that of an oxide semiconductor in an amorphous state can beobtained. In order to improve the surface flatness, the oxidesemiconductor is preferably formed over a flat surface. Specifically,the oxide semiconductor may be formed over a surface with the averagesurface roughness (Ra) of less than or equal to 1 nm, preferably lessthan or equal to 0.3 nm, more preferably less than or equal to 0.1 nm.

Note that, Ra is obtained by three-dimension expansion of center lineaverage roughness that is defined by JIS B 0601 so as to be applied to aplane. The Ra can be expressed as an “average value of the absolutevalues of deviations from a reference surface to a specific surface” andis defined by the formula below.

$\begin{matrix}{{Ra} = {\frac{1}{S_{0}}{\int_{y_{1}}^{y_{2}}{\int_{x_{1}}^{x_{2}}{{\ {{f( {x,y} )} - Z_{0}}}{dxdy}}}}}} & \lbrack {{Formula}\mspace{14mu} 2} \rbrack\end{matrix}$

In the above formula, S₀ represents an area of a plane to be measured (arectangular region which is defined by four points represented bycoordinates (x₁, y₁), (x₁, y₂), (x₂, y₁), and (x₂, y₂)), and Z₀represents an average height of the plane to be measured. Ra can bemeasured using an atomic force microscope (AFM). The measurement planeis a plane where all the measurement data are shown, and the measurementdata consists of three parameters (x, y, z) and is represented by z=f(x, y).

Here, an oxide including a crystal with c-axis alignment, which has atriangular or hexagonal atomic arrangement when seen from the directionof an a-b plane, a surface, or an interface, will be described. In thecrystal, metal atoms are arranged in a layered manner, or metal atomsand oxygen atoms are arranged in a layered manner along the c-axis, andthe direction of the a-axis or the b-axis is varied in the a-b plane(the crystal rotates around the c-axis). Such a crystal is also referredto as a c-axis aligned crystal (CAAC).

In a broad sense, an oxide including CAAC means a non-single-crystaloxide including a phase which has a triangular, hexagonal, regulartriangular, or regular hexagonal atomic arrangement when seen from thedirection perpendicular to the a-b plane and in which metal atoms arearranged in a layered manner or metal atoms and oxygen atoms arearranged in a layered manner when seen from the direction perpendicularto the c-axis direction.

The oxide including CAAC is not a single crystal, but this does not meanthat the oxide including CAAC is composed of only an amorphouscomponent. Although the oxide film including CAAC includes acrystallized portion (crystalline portion), a boundary between onecrystalline portion and another crystalline portion is not clear in somecases.

Nitrogen may be substituted for part of oxygen included in the oxideincluding CAAC. The c-axes of individual crystalline portions includedin the oxide including CAAC may be aligned in a certain direction (e.g.,a direction perpendicular to a surface of a substrate over which theoxide including CAAC is formed or a surface of the oxide includingCAAC). Alternatively, the normals of the a-b planes of the individualcrystalline portions included in the oxide including CAAC may be alignedin a certain direction (e.g., a direction perpendicular to a surface ofa substrate over which the oxide including CAAC is formed or a surfaceof the oxide including CAAC).

The oxide including CAAC becomes a conductor, a semiconductor, or aninsulator depending on its composition or the like. The oxide includingCAAC transmits or does not transmit visible light depending on itscomposition or the like.

An example of such an oxide including CAAC is an oxide which is formedinto a film shape and has a triangular or hexagonal atomic arrangementwhen observed from the direction perpendicular to a surface of the filmor a surface of a supporting substrate, and in which metal atoms arearranged in a layered manner or metal atoms and oxygen atoms (ornitrogen atoms) are arranged in a layered manner when a cross section ofthe film is observed.

An example of a crystal structure included in the oxide including CAACwill be described in detail with reference to FIGS. 10A to 10E, FIGS.11A to 11C, and FIGS. 12A to 12C. In FIGS. 10A to 10E, FIGS. 11A to 11C,and FIGS. 12A to 12C, the vertical direction corresponds to the c-axisdirection and a plane perpendicular to the c-axis direction correspondsto the a-b plane, unless otherwise specified. When the expressions “anupper half” and “a lower half” are simply used, they refer to an upperhalf above the a-b plane and a lower half below the a-b plane (an upperhalf and a lower half with respect to the a-b plane).

FIG. 10A shows a structure including one hexacoordinate In atom and sixtetracoordinate oxygen (hereinafter referred to as tetracoordinate O)atoms proximate to the In atom. Here, a structure including one metalatom and oxygen atoms proximate thereto is referred to as a small group.The structure in FIG. 10A is actually an octahedral structure, but isshown as a planar structure for simplicity. Note that threetetracoordinate O atoms exist in each of an upper half and a lower halfin FIG. 10A. In the small group shown in FIG. 10A, electric charge is 0.

FIG. 10B shows a structure including one pentacoordinate Ga atom, threetricoordinate oxygen (hereinafter referred to as tricoordinate O) atomsproximate to the Ga atom, and two tetracoordinate O atoms proximate tothe Ga atom. All the tricoordinate O atoms exist on the a-b plane. Onetetracoordinate O atom exists in each of an upper half and a lower halfin FIG. 10B. An In atom can also have the structure shown in FIG. 10Bbecause an In atom can have five ligands. In the small group shown inFIG. 10B, electric charge is 0.

FIG. 10C shows a structure including one tetracoordinate Zn atom andfour tetracoordinate O atoms proximate to the Zn atom. In FIG. 10C, onetetracoordinate O atom exists in an upper half and three tetracoordinateO atoms exist in a lower half. Alternatively, three tetracoordinate Oatoms may exist in the upper half and one tetracoordinate O atom mayexist in the lower half in FIG. 10C. In the small group shown in FIG.10C, electric charge is 0.

FIG. 10D shows a structure including one hexacoordinate Sn atom and sixtetracoordinate O atoms proximate to the Sn atom. In FIG. 10D, threetetracoordinate O atoms exist in each of an upper half and a lower half.In the small group shown in FIG. 10D, electric charge is +1.

FIG. 10E shows a small group including two Zn atoms. In FIG. 10E, onetetracoordinate O atom exists in each of an upper half and a lower half.In the small group shown in FIG. 10E, electric charge is −1.

Here, a plurality of small groups form a medium group, and a pluralityof medium groups form a large group (also referred to as a unit cell).

Now, a rule of bonding between the small groups will be described. Thethree O atoms in the upper half with respect to the hexacoordinate Inatom in FIG. 10A each have three proximate In atoms in the downwarddirection, and the three O atoms in the lower half each have threeproximate In atoms in the upward direction. The one O atom in the upperhalf with respect to the pentacoordinate Ga atom in FIG. 10B has oneproximate Ga atom in the downward direction, and the one O atom in thelower half has one proximate Ga atom in the upward direction. The one Oatom in the upper half with respect to the tetracoordinate Zn atom inFIG. 10C has one proximate Zn atom in the downward direction, and thethree O atoms in the lower half each have three proximate Zn atoms inthe upward direction. Similarly, the number of the tetracoordinate Oatoms below the metal atom is equal to the number of the metal atomsproximate to and above each of the tetracoordinate O atoms. Since thecoordination number of the tetracoordinate O atom is four, the sum ofthe number of the metal atoms proximate to and below the O atom and thenumber of the metal atoms proximate to and above the O atom is four.Therefore, when the sum of the number of tetracoordinate O atoms above ametal atom and the number of tetracoordinate O atoms below another metalatom is four, the two kinds of small groups including the metal atomscan be bonded. The reason will be described hereinafter. For example, inthe case where the hexacoordinate metal (In or Sn) atom is bondedthrough three tetracoordinate O atoms in the upper half, it is bonded tothe pentacoordinate metal (Ga or In) atom or the tetracoordinate metal(Zn) atom.

A metal atom having the above coordination number is bonded to anothermetal atom having the above coordination number through atetracoordinate O atom in the c-axis direction. In addition to theabove, a medium group can be formed in a different manner by combining aplurality of small groups so that the total electric charge of thelayered structure is 0.

FIG. 11A shows a model of a medium group included in a layered structureof an In—Sn—Zn—O-based material. FIG. 11B shows a large group includingthree medium groups. Note that FIG. 11C shows an atomic arrangement inthe case where the layered structure in FIG. 11B is observed from thec-axis direction.

In FIG. 11A, for simplicity, a tricoordinate O atom is omitted andtetracoordinate O atoms are shown by a circle; the number in the circleshows the number of tetracoordinate O atoms. For example, threetetracoordinate O atoms existing in each of an upper half and a lowerhalf with respect to a Sn atom are denoted by circled 3. Similarly, inFIG. 11A, one tetracoordinate O atom existing in each of an upper halfand a lower half with respect to an In atom is denoted by circled 1.FIG. 11A also shows a Zn atom proximate to one tetracoordinate O atom ina lower half and three tetracoordinate O atoms in an upper half, and aZn atom proximate to one tetracoordinate O atom in an upper half andthree tetracoordinate O atoms in a lower half.

In the medium group included in the layered structure of theIn—Sn—Zn—O-based material in FIG. 11A, in the order starting from thetop, a Sn atom proximate to three tetracoordinate O atoms in each of anupper half and a lower half is bonded to an In atom proximate to onetetracoordinate O atom in each of an upper half and a lower half, the Inatom is bonded to a Zn atom proximate to three tetracoordinate O atomsin an upper half, the Zn atom is bonded to an In atom proximate to threetetracoordinate O atoms in each of an upper half and a lower halfthrough one tetracoordinate O atom in a lower half with respect to theZn atom, the In atom is bonded to a small group that includes two Znatoms and is proximate to one tetracoordinate O atom in an upper half,and the small group is bonded to a Sn atom proximate to threetetracoordinate O atoms in each of an upper half and a lower halfthrough one tetracoordinate O atom in a lower half with respect to thesmall group. A plurality of such medium groups is bonded to form a largegroup.

Here, electric charge for one bond of a tricoordinate O atom andelectric charge for one bond of a tetracoordinate O atom can be assumedto be −0.667 and −0.5, respectively. For example, electric charge of a(hexacoordinate or pentacoordinate) In atom, electric charge of a(tetracoordinate) Zn atom, and electric charge of a (pentacoordinate orhexacoordinate) Sn atom are +3, +2, and +4, respectively. Accordingly,electric charge in a small group including a Sn atom is +1. Therefore,electric charge of −1, which cancels +1, is needed to form a layeredstructure including a Sn atom. As a structure having electric charge of−1, the small group including two Zn atoms as shown in FIG. 10E isgiven. For example, with one small group including two Zn atoms,electric charge of one small group including a Sn atom can be cancelled,so that the total electric charge of the layered structure can be 0.

When the large group shown in FIG. 11B is repeated, an In—Sn—Zn—O-basedcrystal (In₂SnZn₃O₈) can be obtained. Note that a layered structure ofthe obtained In—Sn—Zn—O-based crystal can be expressed as a compositionformula, In₂SnZn₂O₇(ZnO)_(m) (m is 0 or a natural number). TheIn—Sn—Zn—O-based crystal is preferable because the crystallinity of theIn—Sn—Zn—O-based crystal can be improved by increasing the number of m.

The above-described rule also applies to the following oxides: afour-component metal oxide such as an In—Sn—Ga—Zn-based oxide; athree-component metal oxide such as an In—Ga—Zn-based oxide (alsoreferred to as IGZO), an In—Al—Zn-based oxide, a Sn—Ga—Zn-based oxide,an Al—Ga—Zn-based oxide, a Sn—Al—Zn-based oxide, an In—Hf—Zn-basedoxide, an In—La—Zn-based oxide, an In—Ce—Zn-based oxide, anIn—Pr—Zn-based oxide, an In—Nd—Zn-based oxide, an In—Sm—Zn-based oxide,an In—Eu—Zn-based oxide, an In—Gd—Zn-based oxide, an In—Tb—Zn-basedoxide, an In—Dy—Zn-based oxide, an In—Ho—Zn-based oxide, anIn—Er—Zn-based oxide, an In—Tm—Zn-based oxide, an In—Yb—Zn-based oxide,or an In—Lu—Zn-based oxide; a two-component metal oxide such as anIn—Zn-based oxide, a Sn—Zn-based oxide, an Al—Zn-based oxide, aZn—Mg-based oxide, a Sn—Mg-based oxide, an In—Mg-based oxide, or anIn—Ga-based oxide; a single-component metal oxide, such as an In-basedoxide, a Sn-based oxide, or a Zn-based oxide; and the like.

As an example, FIG. 12A shows a model of a medium group included in alayered structure of an In—Ga—Zn—O-based material.

In the medium group included in the layered structure of theIn—Ga—Zn—O-based material in FIG. 12A, in the order starting from thetop, an In atom proximate to three tetracoordinate O atoms in each of anupper half and a lower half is bonded to a Zn atom proximate to onetetracoordinate O atom in an upper half, the Zn atom is bonded to a Gaatom proximate to one tetracoordinate O atom in each of an upper halfand a lower half through three tetracoordinate O atoms in a lower halfwith respect to the Zn atom, and the Ga atom is bonded to an In atomproximate to three tetracoordinate O atoms in each of an upper half anda lower half through one tetracoordinate O atom in a lower half withrespect to the Ga atom. A plurality of such medium groups is bonded toform a large group.

FIG. 12B shows a large group including three medium groups. Note thatFIG. 12C shows an atomic arrangement in the case where the layeredstructure in FIG. 12B is observed from the c-axis direction.

Here, since electric charge of a hexacoordinate or pentacoordinate Inatom, electric charge of a tetracoordinate Zn atom, and electric chargeof a pentacoordinate Ga atom are +3, +2, +3, respectively, electriccharge of a small group including any of an In atom, a Zn atom, and a Gaatom is 0. As a result, the total electric charge of a medium grouphaving a combination of such small groups is always 0.

In order to form the layered structure of the In—Ga—Zn—O-based material,a large group can be formed using not only the medium group shown inFIG. 12A but also a medium group in which the arrangement of the Inatom, the Ga atom, and the Zn atom is different from that in FIG. 12A.

A dopant imparting n-type or p-type conductivity is added to each of theregion 604 a_C, the region 604 b_C, the region 604 a_D, and the region604 b_D, and the region 604 a_C, the region 604 b_C, the region 604 a_D,and the region 604 b_D each function as a source or a drain of thetransistor. Note that a region functioning as the source of thetransistor is also referred to as a source region, and a regionfunctioning as the drain of the transistor is also referred to as adrain region.

The conductive layers 605 a_A to 605 a_D and the conductive layers 605b_A to 605 b_D function as the source or the drain of the transistor.Note that a layer functioning as a source of the transistor is alsoreferred to as a source electrode or a source wiring, and a layerfunctioning as a drain of the transistor is also referred to as a drainelectrode or a drain wiring.

Each of the conductive layers 605 a_A to 605 a_D and the conductivelayers 605 b_A to 605 b_D can be formed using, for example, a layer of ametal material such as aluminum, magnesium, chromium, copper, tantalum,titanium, molybdenum, or tungsten; or an alloy material which containsany of the above metal materials as a main component. For example, eachof the conductive layers 605 a_A to 605 a_D and the conductive layers605 b_A to 605 b_D can be formed using a layer of an alloy materialcontaining copper, magnesium, and aluminum. Alternatively, each of theconductive layers 605 a_A to 605 a_D and the conductive layers 605 b_Ato 605 b_D can be formed using a stacked-layer structure of layers thatcan be used for the conductive layers 605 a_A to 605 a_D and theconductive layers 605 b_A to 605 b_D. For example, each of theconductive layers 605 a_A to 605 a_D and the conductive layers 605 b_Ato 605 b_D can be formed using a stacked-layer structure including alayer of an alloy material containing copper, magnesium, and aluminumand a layer containing copper.

Further, layer containing a conductive metal oxide can be used for eachof the conductive layers 605 a_A to 605 a_D and the conductive layers605 b_A to 605 b_D. Examples of the conductive metal oxide includeindium oxide, tin oxide, zinc oxide, indium oxide-tin oxide, and indiumoxide-zinc oxide. Note that the conductive metal oxide that can be usedfor each of the conductive layers 605 a_A to 605 a_D and the conductivelayers 605 b_A to 605 b_D may contain silicon oxide.

For each of the insulating layers 606_A and 606_B, a layer of a materialthat can be used for the insulating layers 602_A to 602D can be used.Alternatively, each of the insulating layers 606_A and 606_B can beformed using a stacked-layer structure of a material that can be usedfor the insulating layers 606_A and 606_B. For example, each of theinsulating layers 606_A and 606_B may be formed using a silicon oxidelayer, an aluminum oxide layer, or the like.

Each of the conductive layers 608_A and 608_B functions as a gate of thetransistor. Note that in the case where the transistor includes both theconductive layers 601_A and 608_A or both the conductive layers 601_Band 608_B, one of the conductive layers 601_A and 608_A or one of theconductive layers 601_B and 608_B is referred to as a back gate, a backgate electrode, or a back gate wiring. A plurality of conductive layerseach functioning as a gate is provided with the channel formation layerprovided therebetween, whereby the threshold voltage of the transistorcan be easily controlled.

As each of the conductive layers 608_A and 608_B, a layer of a materialthat can be used for the conductive layers 601_A to 601D can be used,for example. Each of the conductive layers 608_A and 608_B may be formedusing a stacked-layer structure of a material that can be used for theconductive layers 608_A and 608_B.

Note that the transistor of this embodiment may have a structure inwhich an insulating layer is provided over part of the oxidesemiconductor layer functioning as a channel formation layer and aconductive layer functioning as a source or a drain is provided tooverlap with the oxide semiconductor layer with the insulating layerinterposed therebetween. Consequently, the insulating layer functions asa layer protecting the channel formation layer (also referred to as achannel protective layer) of the transistor. As the insulating layerfunctioning as a channel protective layer, a layer including a materialthat can be used for the insulating layers 602_A to 602_D can be usedfor example. Alternatively, an insulating layer functioning as a channelprotective layer may be formed by stacking layers of materials that canbe used for the insulating layers 602_A to 602_D.

Next, as an example of a method for manufacturing the transistor in thisembodiment, an example of a method for manufacturing the transistorshown in FIG. 6A will be described with reference to FIGS. 7A to 7E.FIGS. 7A to 7E are schematic cross-sectional views showing an example ofthe method for manufacturing the transistor in FIG. 6A.

First, as shown in FIG. 7A, the element formation layer 600_A isprepared, a first conductive film is formed over the element formationlayer 600_A, and part of the first conductive film is etched to form theconductive layer 601_A.

A film of a material that can be used for the conductive layer 601_A isformed by a sputtering method, so that the first conductive film can beformed, for example. The first conductive film can be formed by stackinglayers each formed of a material that can be used for the firstconductive film.

When a high-purity gas from which an impurity such as hydrogen, water, ahydroxyl group, or a hydride are removed is used as a sputtering gas,the impurity concentration of a film to be formed can be reduced.

Note that before the film is formed by a sputtering method, preheattreatment may be performed in a preheating chamber of a sputteringapparatus. With the preheat treatment, an impurity such as hydrogen ormoisture can be eliminated.

Further, before the film is formed by a sputtering method, it ispossible to perform the following treatment (called reverse sputtering):instead of applying a voltage to the target side, an RF power source isused for applying a voltage to the substrate side in an argon, nitrogen,helium, or oxygen atmosphere so that plasma is generated to modify asurface where the film is to be formed. With reverse sputtering, powderysubstances (also referred to as particles or dust) attached to thesurface where the film is to be formed can be removed.

In the case where the film is formed by a sputtering method, moistureremaining in a deposition chamber used for forming the film can beremoved with an entrapment vacuum pump or the like. As the entrapmentvacuum pump, a cryopump, an ion pump, or a titanium sublimation pump canbe used, for example. Moisture remaining in the deposition chamber canbe removed with a turbo pump provided with a cold trap.

As a method for forming the conductive layer 601_A, the example of amethod for manufacturing the transistor of this embodiment employs, forexample, the following steps in order to form a layer by etching part ofa film: a resist mask is formed over part of the film by aphotolithography process and the film is etched using the resist mask,thereby forming the layer. Note that in this case, the resist mask isremoved after the layer is formed.

Note that the resist mask may be formed by an inkjet method. A photomaskis not used in an inkjet method; thus, manufacturing cost can bereduced. Alternatively, the resist mask may be formed using alight-exposure mask having a plurality of regions with differenttransmittances (also referred to as a multi-tone mask). With the use ofthe multi-tone mask, a resist mask having different thicknesses can beformed, and the number of resist masks used for manufacturing thetransistor can be reduced.

Next, as shown in FIG. 7B, a first insulating film is formed over theconductive layer 601_A, so that the insulating layer 602_A is formed.

For example, a film of a material that can be used for the insulatinglayer 602_A is formed by sputtering, plasma CVD, or the like, so thatthe first insulating film can be formed. Alternatively, the firstinsulating film can be formed by a stack of layers of materials that canbe used for the insulating layer 602_A. Further, when the film formedusing a material that can be used for the insulating layer 602_A isformed by a high-density plasma-enhanced CVD method (e.g., ahigh-density plasma-enhanced CVD method using microwaves (e.g.,microwaves with a frequency of 2.45 GHz)), the insulating layer 602_Acan be dense and can have higher breakdown voltage.

Next, an oxide semiconductor film is formed over the insulating layer602_A and then part of the oxide semiconductor film is etched, wherebythe oxide semiconductor layer 603_A is formed as shown in FIG. 7C.

For example, a film of an oxide semiconductor material that can be usedfor the semiconductor layer 603_A is formed by a sputtering method, sothat the oxide semiconductor film can be formed. Note that the oxidesemiconductor film may be formed in a rare gas atmosphere, an oxygenatmosphere, or a mixed atmosphere of a rare gas and oxygen.

The oxide semiconductor film can be formed using an oxide target havinga composition ratio: In₂O₃:Ga₂O₃:ZnO=1:1:1 in molar ratio as asputtering target. The oxide semiconductor film may be formed using anoxide target having a composition ratio: In₂O₃:Ga₂O₃:ZnO=1:1:2 in molarratio.

In addition, as the sputtering target, an In—Sn—Zn-based oxide targethaving a composition ratio: In:Sn:Zn=1:2:2, 2:1:3, 1:1:1, 20:45:35, orthe like in an atomic ratio may be used.

Next, as shown in FIG. 7D, a second conductive film is formed over theinsulating layer 602_A and the semiconductor layer 603_A and is partlyetched, so that the conductive layer 605 a_A and the conductive layer605 b_A are formed.

For example, a material that can be used for the conductive layer 605a_A and the conductive layer 605 b_A is formed by sputtering or thelike, whereby the second conductive film can be formed. Alternatively,the second conductive film can be formed by stacking films formed usingmaterials that can be used for the conductive layer 605 a_A and theconductive layer 605 b_A.

Next, as shown in FIG. 7E, the insulating layer 606_A is formed to be incontact with the semiconductor layer 603_A.

For example, a film that can be used as the insulating layer 606_A isformed in a rare gas (typically, argon) atmosphere, an oxygenatmosphere, or a mixed atmosphere of a rare gas and oxygen by asputtering method, whereby the insulating film 606_A. Forming theinsulating layer 606_A by a sputtering method can suppress the decreasein the resistance value of part of the semiconductor layer 603_A thatfunctions as a back channel of the transistor. The temperature of thesubstrate at the time when the insulating layer 606_A is formed ispreferably higher than or equal to room temperature and lower than orequal to 300° C.

Before formation of the insulating layer 606_A, plasma treatment withthe use of a gas of N₂O, N₂, Ar, or the like may be performed to removewater or the like adsorbed on an exposed surface of the semiconductorlayer 603_A. In the case of performing the plasma treatment, theinsulating layer 606_A is preferably formed after the plasma treatmentwithout exposure to air.

Further, in the example of the method for manufacturing the transistorin FIG. 6A, heat treatment is performed, for example, at higher than orequal to 600° C. and lower than or equal to 750° C., or higher than orequal to 600° C. lower than the strain point of the substrate. Forexample, the heat treatment is performed after the oxide semiconductorfilm is formed, after part of the oxide semiconductor film is etched,after the second conductive film is formed, after part of the secondconductive film is etched, or after the insulating layer 606_A isformed.

Note that a heat treatment apparatus for the heat treatment can be anelectric furnace or an apparatus for heating an object by heatconduction or heat radiation from a heater such as a resistance heater.For example, a rapid thermal anneal (RTA) apparatus such as a gas rapidthermal anneal (GRTA) apparatus, or a lamp rapid thermal anneal (LRTA)apparatus can be used. An LRTA apparatus is an apparatus for heating aprocess object by radiation of light (an electromagnetic wave) emittedfrom a lamp such as a halogen lamp, a metal halide lamp, a xenon arclamp, a carbon arc lamp, a high-pressure sodium lamp, or a high-pressuremercury lamp. A GRTA apparatus is an apparatus for heat treatment usinga high-temperature gas. As the high-temperature gas, a rare gas or aninert gas (e.g., nitrogen) which does not react with the object by theheat treatment can be used.

After the heat treatment, a high-purity oxygen gas, a high-purity N₂Ogas, or ultra-dry air (with a dew point of −40° C. or lower, preferably−60° C. or lower) may be introduced into the furnace that has been usedin the above heat treatment. It is preferable that the oxygen gas or theN₂O gas do not contain water, hydrogen, and the like. The purity of theoxygen gas or the N₂O gas which is introduced into the heat treatmentapparatus is preferably greater than or equal to 6N, more preferablygreater than or equal to 7N (i.e., the impurity concentration of theoxygen gas or the N₂O gas is preferably less than or equal to 1 ppm,more preferably less than or equal to 0.1 ppm). By the action of theoxygen gas or the N₂O gas, oxygen is supplied to the semiconductor layer603_A, so that defects caused by oxygen deficiency in the semiconductorlayer 603_A can be reduced.

Further, in addition to the heat treatment, after the insulating layer606_A is formed, heat treatment (preferably at higher than or equal to200° C. and lower than or equal to 600° C., for example, higher than orequal to 250° C. and lower than or equal to 350° C.) may be performed inan inert gas atmosphere or an oxygen gas atmosphere.

Oxygen doping using oxygen plasma may be performed after the insulatinglayer 602_A is formed, after the oxide semiconductor film is formed,after the conductive layers serving as the source electrode and thedrain electrode are formed, after the insulating layer over theconductive layers serving as the source electrode and the drainelectrode is formed, or after the heat treatment is performed. Forexample, an oxygen doping treatment using a high-density plasma of 2.45GHz may be performed. Alternatively, oxygen doping treatment may beperformed by an ion implantation method or ion doping. The oxygen dopingcan reduce variations in electrical characteristics of transistors whichare manufactured. For example, by performing oxygen doping, one of orboth the insulating layer 602_A and the insulating layer 606_A haveoxygen having higher proportion than that in the stoichiometriccomposition. Consequently, excess oxygen in the insulating layer islikely to be supplied to the semiconductor layer 603_A. As a result, anoxygen defect in the semiconductor layer 603_A or at an interfacebetween the semiconductor layer 603_A and one of or both the insulatinglayer 602_A and the insulating layer 606_A can be reduced, which resultsin further reduction in the carrier concentration in the semiconductorlayer 603_A.

For example, when an insulating layer containing gallium oxide is formedas one or each of the insulating layer 602_A and the insulating layer606_A, the composition of the gallium oxide can be set to be Ga₂O_(x) bysupplying the insulating layer with oxygen.

Alternatively, when an insulating layer containing aluminum oxide isformed as one or each of the insulating layer 602_A and the insulatinglayer 606_A, the composition of the aluminum oxide can be set to beAl₂O_(x) by supplying the insulating layer with oxygen.

Further, when an insulating layer containing gallium aluminum oxide oraluminum gallium oxide is formed as one or each of the insulating layer602_A and the insulating layer 606_A, the composition of the galliumaluminum oxide or the aluminum gallium oxide can be set to beGa_(x)Al_(2-x)O_(3+α) by supplying the insulating layer with oxygen.

Through the above steps, an impurity such as hydrogen, water, a hydroxylgroup, or hydride (also referred to as a hydrogen compound) is removedfrom the semiconductor layer 603_A and oxygen is supplied to thesemiconductor layer 603_A; thus, the oxide semiconductor layer can behighly purified.

Moreover, as shown in FIG. 7E, a third conductive film is formed overthe insulating layer 606_A and part of the third conductive film isetched, whereby the conductive layer 608_A is formed.

For example, a film formed using a material that can be used for theconductive layer 608_A is formed by a sputtering method, whereby thethird conductive film can be formed. The third conductive film can beformed by stacking layers formed of materials that can be used for thethird conductive film.

Note that although the example of the method for manufacturing thetransistor shown in FIG. 6A is described, this embodiment is not limitedto this. For example, as for the components in FIGS. 6B to 6D that havethe same designations as the components in FIG. 6A and whose functionsare at least partly the same as those of the components in FIG. 6A, thedescription of the example of the method for manufacturing thetransistor shown in FIG. 6A can be referred to as appropriate.

In the case where the regions 604 a_C and 604 a_D or the regions 604 b_Cand 604 b_D are formed as shown in FIG. 6C or FIG. 6D, the regions 604a_C and 604 a_D or the regions 604 b_C and 604 b_D are formed in aself-aligned manner by adding a dopant to a semiconductor layer from aside where a conductive layer serving as a gate is formed with aninsulating layer serving as a gate insulating layer providedtherebetween.

For example, the dopant can be added with the use of an ion dopingapparatus or an ion implantation apparatus.

As the dopants which is added, for example, one or more of elements ofGroup 13 in the periodic table (e.g., boron), of Group 15 in theperiodic table (e.g., one or more of nitrogen, phosphorus, and arsenic),and of rare gas (e.g., one or more of helium, argon, and xenon) can beused.

As described with FIGS. 6A to 6D and FIGS. 7A to 7E, examples of thetransistor in this embodiment each include the conductive layer servingas the gate; the insulating layer serving as the gate insulating layer;the oxide semiconductor layer which overlaps with the conductive layerserving as the gate with the insulating layer serving as the gateinsulating layer provided therebetween and in which a channel is formed;the conductive layer which is electrically connected to the oxidesemiconductor layer and serves as one of the source and the drain; andthe conductive layer which is electrically connected to the oxidesemiconductor layer and serves as the other of the source and the drain.

The oxide semiconductor layer in which a channel is formed is an oxidesemiconductor layer which is made an i-type or substantially i-type bybeing purified. With the purified oxide semiconductor layer, the carrierconcentration of the oxide semiconductor layer can be lower than1×10¹⁴/cm³, preferably lower than 1×10¹²/cm³, further preferably lowerthan 1×10¹¹/cm³. With the above structure, the off-state current permicrometer of the channel width can be lower than or equal to 10 aA(1×10⁻¹⁷ A), lower than or equal to 1 aA (1×10⁻¹⁸ A), lower than orequal to 10 zA (1×10⁻²⁰ A), further lower than or equal to 1 zA (1×10⁻²¹A), and furthermore lower than or equal to 100 yA (1×10⁻²² A). It ispreferable that the off-state current of the transistor be as low aspossible. The lowest value of the off-state current of the transistor inthis embodiment is estimated to be about 10⁻³⁰ A/μm.

With the use of the transistor including the oxide semiconductor layerin this embodiment as the transistor of the memory circuit in thesemiconductor device of the above embodiment, the memory circuit that isless likely to deteriorate can be formed. In addition, a data holdingperiod of the memory circuit can be longer.

Embodiment 6

In this embodiment, an example of a semiconductor device which canwirelessly communicate data, such as an RFID, will be described.

A structural example of the semiconductor device in this embodiment willbe described with reference to FIG. 8. FIG. 8 is a block diagram showingthe structural example of the semiconductor device in this embodiment.

The semiconductor device shown in FIG. 8 includes an antenna 711, acapacitor 712, a passive element 713, a transistor 714, a memory circuit715, a rectifier circuit 716, a power supply circuit (also referred toas PWRG) 717, a demodulation circuit (also referred to as DMOD) 718, amemory control circuit (also referred to as MCTL) 719, a memory (alsoreferred to as MEM) 720, an encoding circuit (also referred to as ECOD)721, and a modulation circuit (also referred to as MOD) 722. Thesemiconductor device in FIG. 8 transmits and receives a wireless signalto and from an external circuit such as a wireless communication device(a device capable of wireless communication, such as a reader/writer oran interrogator) through the antenna 711.

The antenna 711 has a function of transmitting and receiving a carrierwave. As the antenna 711, the antenna 101 shown in FIG. 1A can beapplied and an antenna having a function of a coil can be used, forexample.

The carrier wave is an alternate-current signal which is also referredto as a carrier. With the carrier wave, a power supply voltage issupplied or data signal communication is performed. Note that a carrierwave externally transmitted to the antenna 711 includes a modulatedcarrier wave (a modulated wave).

The capacitor 712 is electrically connected to the antenna 711 inparallel. Note that a switching element such as a transistor may beprovided between the antenna 711 and one or both of a first capacitorelectrode and a second capacitor electrode of the capacitor 712.

The passive element 713 functions as part of a resonance circuit bybeing electrically connected to the antenna 711 in parallel. As thepassive element 713, a passive element that can be used as the passiveelement 103 shown in FIG. 1A can be used, for example.

The transistor 714 has a function of controlling whether the passiveelement 713 and the antenna 711 are electrically connected in parallelor not. For example, one of a source and a drain of the transistor 714is connected to the other of the source and the drain of the transistor714 through the passive element 713 and the antenna 711.

As the transistor 714, a transistor that can be used as the transistor104 shown in FIG. 1A can be used.

The memory circuit 715 has a function of holding the gate voltage of thetransistor 714.

As the memory circuit 715, a memory circuit that can be used as thememory circuit 105 in the semiconductor device described in the aboveembodiment can be used, for example.

The rectifier circuit 716 has a function of rectifying a voltagegenerated by receiving an electric wave by the antenna 711.

The power supply circuit 717 has a function of generating a power supplyvoltage from a voltage rectified by the rectifier circuit 716. Thegenerated power supply voltage is supplied to each of the functionalcircuits such as the demodulation circuit 718, the memory controlcircuit 719, the memory 720, the encoding circuit 721, and themodulation circuit 722 as shown by dashed lines in FIG. 8. Thedemodulation circuit 718, the memory control circuit 719, the memory720, the encoding circuit 721, and the modulation circuit 722 eachoperate when power is supplied.

The demodulation circuit 718 has a function of demodulating a carrierwave received by the antenna 711 to extract a data signal.

The memory control circuit 719 has a function of generating an accesssignal such as a write control signal, a read control signal, and anaddress signal based on the demodulated data signal.

Data is stored in the memory 720. For example, one or both of read onlymemory (ROM) and random access memory (RAM) can be used as the memory720.

The encoding circuit 721 has a function of encoding the data signal readout from the memory 720.

The modulation circuit 722 has a function of modulating the encoded datasignal and generating a data signal to be transmitted as a carrier wavefrom the antenna 711.

Next, an operation example of the semiconductor device in FIG. 8 will bedescribed.

When the antenna 711 receives a carrier wave, a voltage is generateddepending on the received carrier wave.

The voltage generated in the antenna 711 is input to the power supplycircuit 717 and the demodulation circuit 718.

The power supply circuit 717 generates a power supply voltage based onthe voltage generated in the antenna 711 and outputs the generated powersupply voltage to the demodulation circuit 718, the memory controlcircuit 719, the memory 720, the encoding circuit 721, and themodulation circuit 722.

The demodulation circuit 718 demodulates a signal of the voltage inputfrom the antenna 711 to extract a data signal, and outputs the extracteddata signal to the memory control circuit 719.

The memory control circuit 719 generates an access signal according tothe data signal. The memory control circuit 719 outputs the data signaland a control signal to the memory circuit 715.

The memory 720 writes or reads data according to the access signal.

Data is written to the memory circuit 715 according to the data signaland the control signal. Note that the present invention is not limitedthereto and for example, at the time when the semiconductor device ismanufactured, a control signal and a data signal may be input to thememory circuit 715 so that data is written to the memory circuit 715.

The encoding circuit 721 encodes the data signal read from the memory720.

The modulation circuit 722 modulates a carrier wave to be transmittedfrom the antenna 711 according to the encoded data signal.

The above is the description of the operation example of thesemiconductor device shown in FIG. 8.

As described with reference to FIG. 8, the semiconductor device in thisembodiment can wirelessly transmit and receive data.

In an example of the semiconductor device in this embodiment, whetherthe passive element forms the resonance circuit with another element ornot is controlled by controlling an on state or an off state of thecontrol transistor, whereby the resonance frequency of the semiconductordevice can be changed as appropriate.

Moreover, in an example of the semiconductor device in this embodiment,the memory circuit includes the transistor with low off-state current,so that the gate voltage of the control transistor can be set inresponse to data held in the memory circuit just by writing the data tothe memory circuit. Further, data in the memory circuit can be easilyrewritten. In the memory circuit including the transistor with lowoff-state current, data (voltage) that is held does not changesemipermanently. In other words, the memory circuit including thetransistor with low off-state current has a small leakage current andcan hold data for a long time even when power is not supplied. Thus, thenumber of times of setting again the gate voltage of the controltransistor can be reduced, so that the resonance frequency of thesemiconductor device can be easily set. In addition, power consumptionof the semiconductor device can be reduced.

In an example of the semiconductor device in this embodiment, the memorycontrol circuit controlling the operation of the memory can also controlthe memory circuit including the transistor with low off-state current;therefore, an additional control circuit for controlling the memorycircuit including the transistor with low off-state current isunnecessary. Consequently, in the case of providing the memory circuitincluding the transistor with low off-state current, an increase in thearea of circuits in the semiconductor device can be suppressed.

Embodiment 7

In this embodiment, examples of a semiconductor device capable ofwirelessly supplying a power supply voltage will be described.

Structural examples of the semiconductor device of this embodiment willbe described with reference to FIGS. 9A to 9C. FIGS. 9A to 9C areschematic views for describing the structural examples of thesemiconductor devices in this embodiment.

A semiconductor device shown in FIG. 9A is an example of a portableinformation terminal. The portable information terminal in FIG. 9Aincludes a housing 1001 a and a display portion 1002 a provided in thehousing 1001 a.

Note that a side surface 1003 a of the housing 1001 a may be providedwith one or both of a connection terminal for connecting the portableinformation terminal to an external device and a button for operatingthe portable information terminal shown in FIG. 9A.

The portable information terminal shown in FIG. 9A serves as one or moreof a telephone set, an e-book reader, a personal computer, and a gamemachine, for example.

A semiconductor device shown in FIG. 9B is an example of a foldingportable information terminal. The portable information terminal shownin FIG. 9B includes a housing 1001 b, a display portion 1002 b providedin the housing 1001 b, a housing 1004, a display portion 1005 providedin the housing 1004, and a hinge 1006 for connecting the housing 1001 band the housing 1004.

In the portable information terminal shown in FIG. 9B, the housing 1001b can be stacked on the housing 1004 by moving the housing 1001 b or thehousing 1004 with the hinge 1006.

Note that a side surface 1003 b of the housing 1001 b or a side surface1007 of the housing 1004 may be provided with one or both of aconnection terminal for connecting the portable information terminal toan external device and a button for operating the portable informationterminal shown in FIG. 9B.

The display portion 1002 b and the display portion 1005 may displaydifferent images or one image. Note that the display portion 1005 is notnecessarily provided; a keyboard that is an input device may be providedinstead of the display portion 1005.

The portable information terminal shown in FIG. 9B serves as one or moreof a telephone set, an e-book reader, a personal computer, and a gamemachine, for example.

In addition, the structural example of the portable information terminalin FIG. 9A or 9B is shown in FIG. 9C.

The portable information terminal shown in FIG. 9C includes a wirelesstransmission-reception circuit (also referred to as RF) 1201, a powerstorage device (also referred to as BT) 1204, a power supply circuit(also referred to as PWRG) 1205, an arithmetic processing circuit (alsoreferred to as PRO) 1206, a memory (also referred to as MEM) 1207, adisplay control circuit (also referred to as DISPCTL) 1208, and adisplay panel (also referred to as DISP) 1209.

The wireless transmission-reception circuit 1201 has a function ofgenerating a power supply voltage and a data signal from a receivedelectric wave. The wireless transmission-reception circuit 1201 includesthe antenna, the capacitor, the passive element, the control transistor,and the memory circuit in the semiconductor device in any of Embodiments1 to 4. Further, the wireless transmission-reception circuit 1201 mayinclude functional circuits such as the rectifier circuit, thedemodulation circuit, and the modulation circuit in the semiconductordevice described in Embodiment 6. The wireless transmission-receptioncircuit 1201 may also include functional circuits such as an analogbaseband circuit and a digital baseband circuit.

The power storage device 1204 has a function of supplying a voltage forgenerating a power supply voltage. Note that the power storage device1204 may be recharged depending on the voltage generated by the wirelesstransmission-reception circuit 1201.

The power supply circuit 1205 has a function of generating a powersupply voltage depending on a supplied voltage and supplying the powersupply voltage to the arithmetic processing circuit 1206, the memory1207, the display control circuit 1208, and the display panel 1209.

The arithmetic processing circuit 1206 includes a CPU, a digital signalprocessor (also referred to as DSP), a memory control circuit, and aninterface, for example.

The memory 1207 has a function of writing and reading data according toa signal from the memory control circuit in the arithmetic processingcircuit 1206.

As the display panel 1209, a liquid crystal display panel, an EL displaypanel, or the like can be used, for example. Note that in the case ofthe semiconductor device shown in FIG. 9B, a plurality of display panels1209 is provided.

Moreover, an operation example of the portable information terminalshown in FIG. 9C will be described.

First, the wireless transmission-reception circuit 1201 receives anelectric wave including data, the power storage device 1204 isrecharged, the power supply circuit 1205 generates a power supplyvoltage, and the arithmetic processing circuit 1206 generates imagedata. The generated image data is stored in the memory 1207 as data. Inaddition, the data stored in the memory 1207 is output to the displaypanel 1209 through the display control circuit 1208, and an imagedepending on the input image data is displayed by the display panel1209.

The above is the operation example of the portable information terminalshown in FIG. 9C.

As described with reference to FIGS. 9A to 9C, in an example of thesemiconductor device in this embodiment, whether the passive elementforms the resonance circuit with another element or not is controlled bycontrolling an on state or an off state of the control transistor,whereby the resonance frequency of the semiconductor device can bechanged as appropriate.

Moreover, in an example of the semiconductor device in this embodiment,the memory circuit includes the transistor with low off-state current,so that the gate voltage of the control transistor can be set inresponse to data held in the memory circuit just by writing the data tothe memory circuit. Further, data in the memory circuit can be easilyrewritten. In the memory circuit including the transistor with lowoff-state current, data (voltage) that is held does not changesemipermanently. In other words, the memory circuit including thetransistor with low off-state current has a small leakage current andcan hold data for a long time even when power is not supplied. Thus, thenumber of times of setting again the gate voltage of the controltransistor can be reduced, so that the resonance frequency of thesemiconductor device can be easily set. In addition, power consumptionof the semiconductor device can be reduced.

In an example of the semiconductor device in this embodiment, data istransmitted and received wirelessly and the power storage device isrecharged wirelessly, so that an external power supply device isunnecessary; therefore, the semiconductor device can be used for a longtime even when there is no external power supply device.

Embodiment 8

In this embodiment, an example of an insulated gate transistor includingan In—Sn—Zn-based oxide as an oxide semiconductor will be described.

The actually measured field-effect mobility of an insulated gatetransistor can be lower than its original mobility because of a varietyof reasons; this phenomenon occurs not only in the case of using anoxide semiconductor. One of the reasons that reduce the mobility is adefect inside a semiconductor or a defect at an interface between thesemiconductor and an insulating film. When a Levinson model is used, thefield-effect mobility on the assumption that no defect exists inside thesemiconductor can be calculated theoretically.

Assuming that the original mobility and the measured field-effectmobility of a semiconductor are μ₀ and μ, respectively, and a potentialbarrier (such as a grain boundary) exists in the semiconductor, themeasured field-effect mobility can be expressed as the followingformula.

$\begin{matrix}{\mu = {\mu_{0}{\exp( {- \frac{E}{kT}} )}}} & \lbrack {{Formula}\mspace{14mu} 3} \rbrack\end{matrix}$

Here, E represents the height of the potential barrier, k represents theBoltzmann constant, and T represents the absolute temperature. When thepotential barrier is assumed to be attributed to a defect, the height ofthe potential barrier can be expressed as the following formulaaccording to the Levinson model.

$\begin{matrix}{E = {\frac{e^{2}N^{2}}{8\; ɛ\; n} = \frac{e^{3}N^{2}t}{8\; ɛ\; C_{ox}V_{g}}}} & \lbrack {{Formula}\mspace{14mu} 4} \rbrack\end{matrix}$

Here, e represents the elementary charge, N represents the averagedefect density per unit area in a channel, ε represents the dielectricconstant of the semiconductor, n represents the number of carriers perunit area in the channel, C_(ox) represents the capacitance per unitarea, V_(g) represents the gate voltage, and t represents the thicknessof the channel. In the case where the thickness of the semiconductorlayer is 30 nm or less, the thickness of the channel may be regarded asbeing the same as the thickness of the semiconductor layer. The draincurrent I_(d) in a linear region can be expressed as the followingformula.

$\begin{matrix}{I_{d} = {\frac{W\;\mu\; V_{g}V_{d}C_{ox}}{L}{\exp( {- \frac{E}{kT}} )}}} & \lbrack {{Formula}\mspace{14mu} 5} \rbrack\end{matrix}$

Here, L represents the channel length and W represents the channelwidth, and L and W are each 10 μm. In addition, V_(d) represents thedrain voltage. When dividing both sides of the above equation by V_(g)and then taking logarithms of both sides, the following formula can beobtained.

$\begin{matrix}{{\ln\;( \frac{I_{d}}{V_{g}} )} = \;{{{\ln( \frac{W\;\mu\; V_{d}C_{ox}}{L} )} - \frac{E}{kT}} = {{\ln( \frac{W\;\mu\; V_{d}C_{ox}}{L} )} - \frac{e^{3}N^{2}t}{8\;{kT}\; ɛ\; C_{ox}V_{g}}}}} & \lbrack {{Formula}\mspace{14mu} 6} \rbrack\end{matrix}$

The right side of Formula 6 is a function of V_(g). From the formula, itis found that the defect density N can be obtained from the slope of aline in which ln(I_(d)/V_(g)) is the ordinate and 1/V_(g) is theabscissa. That is, the defect density can be evaluated from theI_(d)-V_(g) characteristics of the transistor. The defect density N ofan oxide semiconductor in which the ratio of indium (In), tin (Sn), andzinc (Zn) is 1:1:1 is approximately 1×10¹²/cm².

On the basis of the defect density obtained in this manner, or the like,μ₀ can be calculated to be 120 cm²/Vs from Formula 3 and Formula 4. Themeasured mobility of an In—Sn—Zn-based oxide including a defect isapproximately 35 cm²/Vs. However, assuming that no defect exists insidethe semiconductor and at the interface between the semiconductor and aninsulating film, the mobility μ₀ of the oxide semiconductor is expectedto be 120 cm²/Vs.

Note that even when no defect exists inside a semiconductor, scatteringat an interface between a channel and a gate insulating layer affectsthe transport property of the transistor. In other words, the mobilityμ₁ at a position that is distance x away from the interface between thechannel and the gate insulating layer can be expressed as the followingformula.

$\begin{matrix}{\frac{1}{\mu_{1}} = {\frac{1}{\mu_{0}} + {\frac{D}{B}\exp\;( {- \frac{x}{G}} )}}} & \lbrack {{Formula}\mspace{14mu} 7} \rbrack\end{matrix}$

Here, D represents the electric field in the gate direction, and B and Gare constants. B and G can be obtained from actual measurement results;according to the above measurement results, B is 4.75×10⁷ cm/s and G is10 nm (the depth to which the influence of interface scatteringreaches). When D is increased (i.e., when the gate voltage isincreased), the second term of Formula 7 is increased and accordinglythe mobility μ₁ is decreased.

Calculation results of the mobility μ₂ of a transistor whose channelincludes an ideal oxide semiconductor without a defect inside thesemiconductor are shown in FIG. 13. For the calculation, devicesimulation software Sentaurus Device manufactured by Synopsys, Inc. wasused, and the band gap, the electron affinity, the relativepermittivity, and the thickness of the oxide semiconductor were assumedto be 2.8 eV, 4.7 eV, 15, and 15 nm, respectively. These values wereobtained by measurement of a thin film that was formed by sputtering.

Further, the work functions of a gate, a source, and a drain wereassumed to be 5.5 eV, 4.6 eV, and 4.6 eV, respectively. The thickness ofa gate insulating layer was assumed to be 100 nm, and the relativepermittivity thereof was assumed to be 4.1. The channel length and thechannel width were each assumed to be 10 μm, and the drain voltage V_(d)was assumed to be 0.1 V.

As shown in FIG. 13, the mobility has a peak of 100 cm²/Vs or more at agate voltage that is a little over 1 V and is decreased as the gatevoltage becomes higher because the influence of interface scattering isincreased. Note that in order to reduce interface scattering, it isdesirable that a surface of the semiconductor layer be flat at theatomic level (atomic layer flatness).

Calculation results of characteristics of minute transistors which aremanufactured using an oxide semiconductor having such a mobility areshown in FIGS. 14A to 14C, FIGS. 15A to 15C, and FIGS. 16A to 16C. FIGS.17A and 17B show cross-sectional structures of the transistors used forthe calculation. The transistors shown in FIGS. 17A and 17B each includea semiconductor region 1303 a and a semiconductor region 1303 c whichhave n⁺-type conductivity in an oxide semiconductor layer. Theresistivities of the semiconductor region 1303 a and the semiconductorregion 1303 c are 2×10⁻³ Ωcm.

The transistor shown in FIG. 17A is formed over a base insulating layer1301 and an embedded insulator 1302 which is embedded in the baseinsulating layer 1301 and formed of aluminum oxide. The transistorincludes the semiconductor region 1303 a, the semiconductor region 1303c, an intrinsic semiconductor region 1303 b serving as a channelformation region therebetween, and a gate 1305. The width of the gate1305 is 33 nm.

A gate insulating layer 1304 is formed between the gate 1305 and thesemiconductor region 1303 b. In addition, a sidewall insulator 1306 aand a sidewall insulator 1306 b are formed on both side surfaces of thegate 1305, and an insulator 1307 is formed over the gate 1305 so as toprevent a short circuit between the gate 1305 and another wiring. Thesidewall insulator has a width of 5 nm. A source electrode 1308 a and adrain electrode 1308 b are provided in contact with the semiconductorregion 1303 a and the semiconductor region 1303 c, respectively. Notethat the channel width of this transistor is 40 nm.

The transistor shown in FIG. 17B is the same as the transistor shown inFIG. 17A in that it is formed over the base insulating layer 1301 andthe embedded insulator 1302 formed of aluminum oxide and that itincludes the semiconductor region 1303 a, the semiconductor region 1303c, the intrinsic semiconductor region 1303 b provided therebetween, thegate 1305 having a width of 33 nm, the gate insulating layer 1304, thesidewall insulator 1306 a, the sidewall insulator 1306 b, the insulator1307, the source electrode 1308 a, and the drain electrode 1308 b.

The transistor shown in FIG. 17B is different from the transistor shownin FIG. 17A in the conductivity type of semiconductor regions under thesidewall insulator 1306 a and the sidewall insulator 1306 b. In thetransistor shown in FIG. 17A, the semiconductor regions under thesidewall insulator 1306 a and the sidewall insulator 1306 b are part ofthe semiconductor region 1303 a having n⁺-type conductivity and part ofthe semiconductor region 1303 c having n⁺-type conductivity, whereas inthe transistor shown in FIG. 17B, the semiconductor regions under thesidewall insulator 1306 a and the sidewall insulator 1306 b are part ofthe intrinsic semiconductor region 1303 b. In other words, a regionhaving a width of L_(off) which overlaps with neither the semiconductorregion 1303 a (the semiconductor region 1303 c) nor the gate 1305 isprovided. This region is called an offset region, and the width L_(off)is called an offset length. As is seen from the drawing, the offsetlength is equal to the width of the sidewall insulator 1306 a (thesidewall insulator 1306 b).

The other parameters used in calculation are as described above. For thecalculation, device simulation software Sentaurus Device manufactured bySynopsys, Inc. was used. FIGS. 14A to 14C show the gate voltage (V_(g):a potential difference between the gate and the source) dependence ofthe drain current (I_(d), a solid line) and the mobility (μ, a dottedline) of the transistor having the structure illustrated in FIG. 17A.The drain current I_(d) is obtained by calculation under the assumptionthat the drain voltage (a potential difference between the drain and thesource) is +1 V and the mobility μ is obtained by calculation under theassumption that the drain voltage is +0.1 V.

FIG. 14A shows the gate voltage dependence of the transistor in the casewhere the thickness of the gate insulating layer is 15 nm, FIG. 14Bshows that of the transistor in the case where the thickness of the gateinsulating layer is 10 nm, and FIG. 14C shows that of the transistor inthe case where the thickness of the gate insulating layer is 5 nm. Asthe gate insulating layer is thinner, the drain current I_(d) (off-statecurrent) particularly in an off state is significantly decreased. Incontrast, there is no noticeable change in the peak value of themobility μ and the drain current I_(d) in an on state (on-statecurrent). The graphs show that the drain current exceeds 10 μA, which isrequired in a memory element and the like, at a gate voltage of around 1V.

FIGS. 15A to 15C show the gate voltage V_(g) dependence of the draincurrent I_(d) (a solid line) and the mobility μ (a dotted line) of thetransistor having the structure illustrated in FIG. 17B where the offsetlength L_(off) is 5 nm. The drain current I_(d) is obtained bycalculation under the assumption that the drain voltage is +1 V and themobility μ is obtained by calculation under the assumption that thedrain voltage is +0.1 V. FIG. 15A shows the gate voltage dependence ofthe transistor in the case where the thickness of the gate insulatinglayer is 15 nm, FIG. 15B shows that of the transistor in the case wherethe thickness of the gate insulating layer is 10 nm, and FIG. 15C showsthat of the transistor in the case where the thickness of the gateinsulating layer is 5 nm.

Further, FIGS. 16A to 16C show the gate voltage dependence of the draincurrent I_(d) (a solid line) and the mobility μ (a dotted line) of thetransistor having the structure illustrated in FIG. 17B where the offsetlength L_(off) is 15 nm. The drain current I_(d) is obtained bycalculation under the assumption that the drain voltage is +1 V and themobility μ is obtained by calculation under the assumption that thedrain voltage is +0.1 V. FIG. 16A shows the gate voltage dependence ofthe transistor in the case where the thickness of the gate insulatinglayer is 15 nm, FIG. 16B shows that of the transistor in the case wherethe thickness of the gate insulating layer is 10 nm, and FIG. 16C showsthat of the transistor in the case where the thickness of the gateinsulating layer is 5 nm.

In either of the structures, as the gate insulating layer is thinner,the off-state current is significantly decreased, whereas no noticeablechange arises in the peak value of the mobility μ and the on-statecurrent.

Note that the peak of the mobility μ is approximately 80 cm²/Vs in FIGS.14A to 14C, approximately 60 cm²/Vs in FIGS. 15A to 15C, andapproximately 40 cm²/Vs in FIGS. 16A to 16C; thus, the peak of themobility μ is decreased as the offset length L_(off) is increased.Further, the same applies to the off-state current. The on-state currentis also decreased as the offset length L_(off) is increased; however,the decrease in the on-state current is much more gradual than thedecrease in the off-state current. Further, the graphs show that ineither of the structures, the drain current exceeds 10 μA, which isrequired in a memory element and the like, at a gate voltage of around 1V.

Embodiment 9

In this embodiment, the experiment results and the like of an insulatedgate transistor including an In—Sn—Zn-based oxide as an oxidesemiconductor will be described.

A transistor in which an oxide semiconductor including In, Sn, and Zn asmain components is used as a channel formation region can have favorablecharacteristics by depositing the oxide semiconductor while heating asubstrate or by performing heat treatment after formation of an oxidesemiconductor film. Note that a main component refers to an elementincluded in a composition at 5 atomic % or higher.

By intentionally heating the substrate after formation of the oxidesemiconductor film including In, Sn, and Zn as main components, thefield-effect mobility of the transistor can be improved. Further, thethreshold voltage of the transistor can be positively shifted to makethe transistor normally off.

As an example, FIGS. 18A to 18C each show characteristics of atransistor in which an oxide semiconductor film including In, Sn, and Znas main components and having a channel length L of 3 μm and a channelwidth W of 10 μm, and a gate insulating layer with a thickness of 100 nmare used. Note that V_(d) was set to 10 V.

FIG. 18A shows characteristics of a transistor whose oxide semiconductorfilm including In, Sn, and Zn as main components was formed bysputtering without heating a substrate intentionally. The field-effectmobility of the transistor is 18.8 cm²/Vsec. On the other hand, when theoxide semiconductor film including In, Sn, and Zn as main components isformed while heating the substrate intentionally, the field-effectmobility can be improved. FIG. 18B shows characteristics of a transistorwhose oxide semiconductor film including In, Sn, and Zn as maincomponents was formed while heating a substrate at 200° C. Thefield-effect mobility of the transistor is 32.2 cm²/Vsec.

The field-effect mobility can be further improved by performing heattreatment after formation of the oxide semiconductor film including In,Sn, and Zn as main components. FIG. 18C shows characteristics of atransistor whose oxide semiconductor film including In, Sn, and Zn asmain components was formed by sputtering at 200° C. and then subjectedto heat treatment at 650° C. The field-effect mobility of the transistoris 34.5 cm²/Vsec.

The intentional heating of the substrate is expected to have anadvantageous effect of reducing moisture taken into the oxidesemiconductor film during the formation by sputtering. Further, the heattreatment after film formation enables hydrogen, a hydroxyl group, ormoisture to be released and removed from the oxide semiconductor film.In this manner, the field-effect mobility can be improved. Such animprovement in field-effect mobility is presumed to be achieved not onlyby removal of an impurity by dehydration or dehydrogenation but also bya reduction in interatomic distance due to an increase in density. Theoxide semiconductor can be crystallized by being purified by removal ofan impurity from the oxide semiconductor. In the case where such apurified non-single-crystal oxide semiconductor is used, ideally, afield-effect mobility exceeding 100 cm²/Vsec is expected to be realized.

The oxide semiconductor including In, Sn, and Zn as main components maybe crystallized in the following manner: oxygen ions are implanted intothe oxide semiconductor; hydrogen, a hydroxyl group, or moistureincluded in the oxide semiconductor is released by heat treatment; andthe oxide semiconductor is crystallized through the heat treatment or byanother heat treatment performed later. By such crystallizationtreatment or recrystallization treatment, a non-single-crystal oxidesemiconductor having favorable crystallinity can be obtained.

The intentional heating of the substrate during film formation and/orthe heat treatment after the film formation contributes not only toimproving field-effect mobility but also to making the transistornormally off. In a transistor whose oxide semiconductor film includingIn, Sn, and Zn as main components, which is formed without heating asubstrate intentionally, is used as a channel formation region, thethreshold voltage tends to be shifted negatively. However, when theoxide semiconductor film formed while heating the substrateintentionally is used, the problem of the negative shift of thethreshold voltage can be solved. That is, the threshold voltage isshifted so that the transistor becomes normally off; this tendency canbe confirmed by comparison between FIGS. 18A and 18B.

Note that the threshold voltage can also be controlled by changing theratio of In, Sn, and Zn; when the composition ratio of In, Sn, and Zn is2:1:3, formation of a normally-off transistor is expected. In addition,a highly crystalline oxide semiconductor film can be obtained by settingthe composition ratio of a target as follows: In:Sn:Zn=2:1:3.

The temperature of the intentional heating of the substrate or thetemperature of the heat treatment is 150° C. or higher, preferably 200°C. or higher, or more preferably 400° C. or higher. When film formationor heat treatment is performed at a high temperature, the transistor canbe normally off.

By intentionally heating the substrate during film formation and/or byperforming heat treatment after the film formation, the stabilityagainst a gate-bias stress can be increased. For example, when a gatebias is applied with an intensity of 2 MV/cm at 150° C. for 1 hour,drift of the threshold voltage can be less than ±1.5 V, preferably lessthan ±1.0 V.

A BT test was performed on the following two transistors: Sample 1 onwhich heat treatment was not performed after formation of an oxidesemiconductor film; and Sample 2 on which heat treatment at 650° C. wasperformed after formation of an oxide semiconductor film.

First, V_(g)-I_(d) characteristics of the transistors were measured at asubstrate temperature of 25° C. and V_(d) of 10 V. Then, the substratetemperature was set to 150° C. and V_(d) was set to 0.1 V. After that,V_(g) of 20 V was applied so that the intensity of an electric fieldapplied to the gate insulating layer was 2 MV/cm, and the condition waskept for 1 hour. Next, V_(g) was set to 0 V. Then, V_(g)-I_(d)characteristics of the transistors were measured at a substratetemperature of 25° C. and V_(d) of 10 V. This process is called apositive BT test.

In a similar manner, first, V_(g)-I_(d) characteristics of thetransistors were measured at a substrate temperature of 25° C. and V_(d)of 10 V. Then, the substrate temperature was set to 150° C. and V_(d)was set to 0.1 V. After that, V_(g) of −20 V was applied so that theintensity of an electric field applied to the gate insulating layer was−2 MV/cm, and the condition was kept for 1 hour. Next, V_(g) was set to0 V. Then, V_(g)-I_(d) characteristics of the transistors were measuredat a substrate temperature of 25° C. and V_(d) of 10 V. This process iscalled a negative BT test.

FIGS. 19A and 19B show a result of the positive BT test of Sample 1 anda result of the negative BT test of Sample 1, respectively. FIGS. 20Aand 20B show a result of the positive BT test of Sample 2 and a resultof the negative BT test of Sample 2, respectively.

The amounts of shift in the threshold voltage of Sample 1 due to thepositive BT test and that due to the negative BT test were 1.80 V and−0.42 V, respectively. The amounts of shift in the threshold voltage ofSample 2 due to the positive BT test and that due to the negative BTtest were 0.79 V and 0.76 V, respectively. It is found that, in each ofSample 1 and Sample 2, the amount of shift in the threshold voltagebetween before and after the BT tests is small and the reliability ishigh.

The heat treatment can be performed in an oxygen atmosphere;alternatively, the heat treatment may be performed first in anatmosphere of nitrogen or an inert gas or under reduced pressure, andthen in an atmosphere including oxygen. Oxygen is supplied to the oxidesemiconductor after dehydration or dehydrogenation, whereby anadvantageous effect of the heat treatment can be further increased. As amethod for supplying oxygen after dehydration or dehydrogenation, amethod in which oxygen ions are accelerated by an electric field andimplanted into the oxide semiconductor film may be employed.

A defect due to oxygen deficiency is easily caused in the oxidesemiconductor or at an interface between the oxide semiconductor and astacked film; however, when excess oxygen is included in the oxidesemiconductor by the heat treatment, oxygen deficiency caused constantlycan be compensated for with excess oxygen. The excess oxygen is oxygenexisting between lattices. When the concentration of excess oxygen isset to higher than or equal to 1×10¹⁶/cm³ and lower than or equal to2×10²⁰/cm³, excess oxygen can be included in the oxide semiconductorwithout causing crystal distortion or the like.

When heat treatment is performed so that at least part of the oxidesemiconductor includes crystal, a more stable oxide semiconductor filmcan be obtained. For example, when an oxide semiconductor film which isformed by sputtering using a target having a composition ratio ofIn:Sn:Zn=1:1:1 without heating a substrate intentionally is analyzed byX-ray diffraction (XRD), a halo pattern is observed. The formed oxidesemiconductor film can be crystallized by being subjected to heattreatment. The temperature of the heat treatment can be set asappropriate; when the heat treatment is performed at 650° C., forexample, a clear diffraction peak can be observed in an X-raydiffraction analysis.

An XRD analysis of an In—Sn—Zn—O film was conducted. The XRD analysiswas conducted using an X-ray diffractometer D8 ADVANCE manufactured byBruker AXS, and measurement was performed by an out-of-plane method.

Sample A and Sample B were prepared and the XRD analysis was performedthereon. A method for manufacturing Sample A and Sample B will bedescribed below.

An In—Sn—Zn—O film with a thickness of 100 nm was formed over a quartzsubstrate that had been subjected to dehydrogenation treatment.

The In—Sn—Zn—O film was formed with a sputtering apparatus with a powerof 100 W (DC) in an oxygen atmosphere. An In—Sn—Zn—O target having anatomic ratio of In:Sn:Zn=1:1:1 was used as a target. Note that thesubstrate heating temperature in film formation was set at 200° C. Asample manufactured in this manner was used as Sample A.

Next, a sample manufactured by a method similar to that of Sample A wassubjected to heat treatment at 650° C. As the heat treatment, heattreatment in a nitrogen atmosphere was first performed for 1 hour andheat treatment in an oxygen atmosphere was further performed for 1 hourwithout lowering the temperature. A sample manufactured in this mannerwas used as Sample B.

FIG. 21 shows XRD spectra of Sample A and Sample B. No peak derived fromcrystal was observed in Sample A, whereas peaks derived from crystalwere observed when 2θ was around 35 deg. and 37 deg. to 38 deg. inSample B.

As described above, by intentionally heating the substrate duringdeposition of an oxide semiconductor including In, Sn, and Zn as maincomponents and/or by performing heat treatment after the deposition,characteristics of a transistor can be improved.

These substrate heating and heat treatment have an effect of preventinghydrogen or a hydroxyl group, which is an adverse impurity for an oxidesemiconductor, from being included in the film or an effect of removinghydrogen and a hydroxyl group from the film. That is, an oxidesemiconductor can be purified by removing hydrogen serving as a donorimpurity from the oxide semiconductor, whereby a normally-off transistorcan be obtained. The high purification of an oxide semiconductor enablesthe off-state current of the transistor to be 1 aA/μm or lower. Here,the unit of the off-state current represents current per micrometer of achannel width.

FIG. 22 shows a relation between the off-state current of a transistorand the inverse of substrate temperature (absolute temperature) atmeasurement. Here, for simplicity, the horizontal axis represents avalue (1000/T) obtained by multiplying an inverse of substratetemperature at measurement by 1000.

Specifically, as shown in FIG. 22, the off-state current can be 1 aA/μm(1×10⁻¹⁸ A/μm) or lower, 100 zA/μm (1×10⁻¹⁹ A/μm) or lower, and 1 zA/μm(1×10⁻²¹ A/μm) or lower when the substrate temperature is 125° C., 85°C., and room temperature (27° C.), respectively. Preferably, theoff-state current can be 0.1 aA/μm (1×10⁻¹⁹ A/μm) or lower, 10 zA/μm(1×10⁻²⁰ A/μm) or lower, and 0.1 zA/μm (1×10⁻²² A/μm) or lower at 125°C., 85° C., and room temperature, respectively. The above values ofoff-state currents are clearly much lower than that of the transistorusing Si as a semiconductor film.

Note that in order to prevent hydrogen and moisture from being includedin the oxide semiconductor film during formation thereof, it ispreferable to increase the purity of a sputtering gas by sufficientlysuppressing leakage from the outside of a film formation chamber anddegasification through an inner wall of the film formation chamber. Forexample, a gas with a dew point of −70° C. or lower is preferably usedas the sputtering gas in order to prevent moisture from being includedin the film. In addition, it is preferable to use a target which ispurified so as not to include an impurity such as hydrogen or moisture.Although it is possible to remove moisture from a film of an oxidesemiconductor including In, Sn, and Zn as main components by heattreatment, a film which does not include moisture originally ispreferably formed because moisture is released from the oxidesemiconductor including In, Sn, and Zn as main components at a highertemperature than from an oxide semiconductor including In, Ga, and Zn asmain components.

The relation between the substrate temperature and electriccharacteristics of a transistor of a sample, on which heat treatment at650° C. was performed after formation of the oxide semiconductor film,was evaluated.

The transistor used for the measurement has a channel length L of 3 μm,a channel width W of 10 μm, Lov of 0 μm, and dW of 0 μm. Note that V_(d)was set to 10 V. Note that the substrate temperature was −40° C., −25°C., 25° C., 75° C., 125° C., and 150° C. Here, in a transistor, thewidth of a portion where a gate electrode overlaps with one of a pair ofelectrodes is referred to as Lov, and the width of a portion of the pairof electrodes, which does not overlap with an oxide semiconductor film,is referred to as dW.

FIG. 23 shows the V_(g) dependence of I_(d) (a solid line) andfield-effect mobility (a dotted line). FIG. 24A shows a relation betweenthe substrate temperature and the threshold voltage, and FIG. 24B showsa relation between the substrate temperature and the field-effectmobility.

From FIG. 24A, it is found that the threshold voltage gets lower as thesubstrate temperature increases. Note that the threshold voltage isdecreased from 1.09 V to −0.23 V in the range from −40° C. to 150° C.

From FIG. 24B, it is found that the field-effect mobility gets lower asthe substrate temperature increases. Note that the field-effect mobilityis decreased from 36 cm²/Vs to 32 cm²/Vs in the range from −40° C. to150° C. Thus, it is found that variation in electric characteristics issmall in the above temperature range.

In a transistor in which such an oxide semiconductor including In, Sn,and Zn as main components is used as a channel formation region, afield-effect mobility of 30 cm²/Vsec or higher, preferably 40 cm²/Vsecor higher, or more preferably 60 cm²/Vsec or higher can be obtained withthe off-state current maintained at 1 aA/μm or lower, which can achieveon-state current needed for an LSI. For example, in an FET where L/W is33 nm/40 nm, an on-state current of 12 μA or higher can flow when thegate voltage is 2.7 V and the drain voltage is 1.0 V. In addition,sufficient electric characteristics can be ensured in a temperaturerange needed for operation of a transistor. With such characteristics,an integrated circuit having a novel function can be realized withoutdecreasing the operating speed even when a transistor including an oxidesemiconductor is also provided in an integrated circuit formed using aSi semiconductor.

Example 1

In this example, an example of a transistor in which an In—Sn—Zn—O filmis used as an oxide semiconductor film will be described with referenceto FIGS. 25A and 25B.

FIGS. 25A and 25B are a top view and a cross-sectional view of acoplanar transistor having a top-gate top-contact structure. FIG. 25A isthe top view of the transistor. FIG. 25B shows cross section A-B alongdashed-dotted line A-B in FIG. 25A.

The transistor shown in FIG. 25B includes a substrate 960; a baseinsulating film 961 provided over the substrate 960; a protectiveinsulating film 962 provided in the periphery of the base insulatingfilm 961; an oxide semiconductor film 963 provided over the baseinsulating film 961 and the protective insulating film 962 and includinga high-resistance region 963 a and low-resistance regions 963 b; a gateinsulating layer 964 provided over the oxide semiconductor film 963; agate electrode 965 provided to overlap with the oxide semiconductor film963 with the gate insulating layer 964 interposed therebetween; asidewall insulating film 966 provided in contact with a side surface ofthe gate electrode 965; a pair of electrodes 967 provided in contactwith at least the low-resistance regions 963 b; an interlayer insulatingfilm 968 provided to cover at least the oxide semiconductor film 963,the gate electrode 965, and the pair of electrodes 967; and a wiring 969provided to connect to at least one of the pair of electrodes 967through an opening formed in the interlayer insulating film 968.

Although not shown, a protective film may be provided to cover theinterlayer insulating film 968 and the wiring 969. With the protectivefilm, a minute amount of leakage current generated by surface conductionof the interlayer insulating film 968 can be reduced and thus theoff-state current of the transistor can be reduced.

Example 2

In this example, another example of a transistor in which an In—Sn—Zn—Ofilm is used as an oxide semiconductor film will be described.

FIGS. 26A and 26B are a top view and a cross-sectional view which show astructure of a transistor manufactured in this example. FIG. 26A is thetop view of the transistor. FIG. 26B is a cross-sectional view alongdashed-dotted line A-B in FIG. 26A.

The transistor shown in FIG. 26B includes a substrate 970; a baseinsulating film 971 provided over the substrate 970; an oxidesemiconductor film 973 provided over the base insulating film 971; apair of electrodes 976 provided in contact with the oxide semiconductorfilm 973; a gate insulating layer 974 provided over the oxidesemiconductor film 973 and the pair of electrodes 976; a gate electrode975 provided to overlap with the oxide semiconductor film 973 with thegate insulating layer 974 interposed therebetween; an interlayerinsulating film 977 provided to cover the gate insulating layer 974 andthe gate electrode 975; wirings 978 connected to the pair of electrodes976 through openings formed in the interlayer insulating film 977; and aprotective film 979 provided to cover the interlayer insulating film 977and the wirings 978.

As the substrate 970, a glass substrate was used. As the base insulatingfilm 971, a silicon oxide film was used. As the oxide semiconductor film973, an In—Sn—Zn—O film was used. As the pair of electrodes 976, atungsten film was used. As the gate insulating layer 974, a siliconoxide film was used. The gate electrode 975 had a stacked-layerstructure of a tantalum nitride film and a tungsten film. The interlayerinsulating film 977 had a stacked-layer structure of a siliconoxynitride film and a polyimide film. The wirings 978 each had astacked-layer structure in which a titanium film, an aluminum film, anda titanium film were formed in this order. As the protective film 979, apolyimide film was used.

Note that in the transistor having the structure shown in FIG. 26A, thewidth of a portion where the gate electrode 975 overlaps with one of thepair of electrodes 976 is referred to as Lov. Similarly, the width of aportion where the pair of electrodes 976, which does not overlap withthe oxide semiconductor film 973, is referred to as dW.

This application is based on Japanese Patent Application serial No.2011-047460 filed with Japan Patent Office on Mar. 4, 2011 and JapanesePatent Application serial No. 2011-111004 filed with Japan Patent Officeon May 18, 2011, the entire contents of which are hereby incorporated byreference.

What is claimed is:
 1. A semiconductor device comprising: a coil; acapacitor electrically connected to the coil in parallel; a passiveelement that forms a resonance circuit with the coil and the capacitorby being electrically connected to the coil and the capacitor inparallel; a first transistor capable of controlling whether the passiveelement is electrically connected to the coil and the capacitor inparallel or not; a memory circuit, wherein the memory circuit includes:a second transistor that comprises a semiconductor layer including achannel, the channel including an oxide semiconductor; a secondcapacitor; and a third transistor in which a voltage of one of a sourceand a drain of the third transistor is changed in accordance with anelectric wave received by the coil, the other one of the source and thedrain of the third transistor is electrically connected to a gate of thefirst transistor, and a gate of the third transistor is directlyconnected to one of a source and a drain of the second transistor andone of electrodes of the second capacitor; and a third capacitor whosefirst electrode is electrically connected to the gate of the firsttransistor and whose second electrode is electrically connected to theother one of the source and the drain of the third transistor.
 2. Thesemiconductor device according to claim 1, wherein a data signal isinput to the other one of the source and the drain of the secondtransistor.
 3. The semiconductor device according to claim 1, whereinthe passive element is one of a capacitor and a coil.
 4. Thesemiconductor device according to claim 1, wherein the oxidesemiconductor is an In—Ga—Zn-based oxide semiconductor.
 5. Thesemiconductor device according to claim 1, further comprising arectifier circuit whose first terminal is electrically connected to thefirst terminal of the coil and whose second terminal is electricallyconnected to the second terminal of the coil.
 6. The semiconductordevice according to claim 1, wherein the oxide semiconductor is anIn—Sn—Zn based oxide semiconductor.
 7. The semiconductor deviceaccording to claim 1, wherein the semiconductor layer comprisescrystalline portions whose c-axes are aligned in a directionperpendicular to a surface of the semiconductor layer, and wherein eachof the crystalline portions is not a single crystal.
 8. Thesemiconductor device according to claim 1, wherein off-state current permicrometer of a channel width of the second transistor is lower than1×10⁻¹⁷ A.
 9. A semiconductor device comprising: an antenna; a capacitorwhose first terminal is electrically connected to a first terminal ofthe antenna and whose second terminal is electrically connected to asecond terminal of the antenna; a passive element whose first terminalis electrically connected to the first terminal of the capacitor; afirst transistor whose one of a source and a drain is electricallyconnected to a second terminal of the passive element and whose theother one of the source and the drain is electrically connected to thesecond terminal of the capacitor; a second transistor that comprises asemiconductor layer including a channel, the channel including an oxidesemiconductor; a second capacitor; a third transistor whose one of asource and a drain is electrically connected to the first terminal ofthe passive element, whose the other one of the source and the drain iselectrically connected to a gate of the first transistor, and whose gateis directly connected to one of a source and a drain of the secondtransistor and one of electrodes of the second capacitor; and a thirdcapacitor whose first electrode is electrically connected to the gate ofthe first transistor and whose second electrode is electricallyconnected to the other one of the source and the drain of the thirdtransistor.
 10. The semiconductor device according to claim 9, wherein adata signal is input to the other one of the source and the drain of thesecond transistor.
 11. The semiconductor device according to claim 9,wherein the passive element is one of a capacitor and a coil.
 12. Thesemiconductor device according to claim 9, wherein the oxidesemiconductor is an In—Ga—Zn-based oxide semiconductor.
 13. Thesemiconductor device according to claim 9, further comprising arectifier circuit whose first terminal is electrically connected to thefirst terminal of the antenna and whose second terminal is electricallyconnected to the second terminal of the antenna.
 14. The semiconductordevice according to claim 9, wherein the oxide semiconductor is anIn—Sn—Zn based oxide semiconductor.
 15. The semiconductor deviceaccording to claim 9, wherein the semiconductor layer comprisescrystalline portions whose c-axes are aligned in a directionperpendicular to a surface of the semiconductor layer, and wherein eachof the crystalline portions is not a single crystal.
 16. Thesemiconductor device according to claim 9, wherein off-state current permicrometer of a channel width of the second transistor is lower than1×10⁻¹⁷ A.